JPS6213618B2 - - Google Patents

Info

Publication number
JPS6213618B2
JPS6213618B2 JP54126634A JP12663479A JPS6213618B2 JP S6213618 B2 JPS6213618 B2 JP S6213618B2 JP 54126634 A JP54126634 A JP 54126634A JP 12663479 A JP12663479 A JP 12663479A JP S6213618 B2 JPS6213618 B2 JP S6213618B2
Authority
JP
Japan
Prior art keywords
inspected
chipping
photoelectric conversion
conversion element
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54126634A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5648547A (en
Inventor
Yoshinobu Kashiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP12663479A priority Critical patent/JPS5648547A/ja
Publication of JPS5648547A publication Critical patent/JPS5648547A/ja
Publication of JPS6213618B2 publication Critical patent/JPS6213618B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
JP12663479A 1979-09-28 1979-09-28 Crack detector Granted JPS5648547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12663479A JPS5648547A (en) 1979-09-28 1979-09-28 Crack detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12663479A JPS5648547A (en) 1979-09-28 1979-09-28 Crack detector

Publications (2)

Publication Number Publication Date
JPS5648547A JPS5648547A (en) 1981-05-01
JPS6213618B2 true JPS6213618B2 (xx) 1987-03-27

Family

ID=14940042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12663479A Granted JPS5648547A (en) 1979-09-28 1979-09-28 Crack detector

Country Status (1)

Country Link
JP (1) JPS5648547A (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0436899Y2 (xx) * 1987-12-28 1992-08-31

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009168615A (ja) * 2008-01-16 2009-07-30 Denso Corp 外観検査装置及び外観検査方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036189A (xx) * 1973-07-31 1975-04-05
JPS5149779A (ja) * 1974-10-28 1976-04-30 Canon Kk Butsutairyobuketsukankensahoho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036189A (xx) * 1973-07-31 1975-04-05
JPS5149779A (ja) * 1974-10-28 1976-04-30 Canon Kk Butsutairyobuketsukankensahoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0436899Y2 (xx) * 1987-12-28 1992-08-31

Also Published As

Publication number Publication date
JPS5648547A (en) 1981-05-01

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