JPS6213618B2 - - Google Patents
Info
- Publication number
- JPS6213618B2 JPS6213618B2 JP54126634A JP12663479A JPS6213618B2 JP S6213618 B2 JPS6213618 B2 JP S6213618B2 JP 54126634 A JP54126634 A JP 54126634A JP 12663479 A JP12663479 A JP 12663479A JP S6213618 B2 JPS6213618 B2 JP S6213618B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- chipping
- photoelectric conversion
- conversion element
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 230000003111 delayed effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12663479A JPS5648547A (en) | 1979-09-28 | 1979-09-28 | Crack detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12663479A JPS5648547A (en) | 1979-09-28 | 1979-09-28 | Crack detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5648547A JPS5648547A (en) | 1981-05-01 |
JPS6213618B2 true JPS6213618B2 (xx) | 1987-03-27 |
Family
ID=14940042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12663479A Granted JPS5648547A (en) | 1979-09-28 | 1979-09-28 | Crack detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5648547A (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0436899Y2 (xx) * | 1987-12-28 | 1992-08-31 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009168615A (ja) * | 2008-01-16 | 2009-07-30 | Denso Corp | 外観検査装置及び外観検査方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036189A (xx) * | 1973-07-31 | 1975-04-05 | ||
JPS5149779A (ja) * | 1974-10-28 | 1976-04-30 | Canon Kk | Butsutairyobuketsukankensahoho |
-
1979
- 1979-09-28 JP JP12663479A patent/JPS5648547A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036189A (xx) * | 1973-07-31 | 1975-04-05 | ||
JPS5149779A (ja) * | 1974-10-28 | 1976-04-30 | Canon Kk | Butsutairyobuketsukankensahoho |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0436899Y2 (xx) * | 1987-12-28 | 1992-08-31 |
Also Published As
Publication number | Publication date |
---|---|
JPS5648547A (en) | 1981-05-01 |
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