JPS62133090U - - Google Patents

Info

Publication number
JPS62133090U
JPS62133090U JP2113886U JP2113886U JPS62133090U JP S62133090 U JPS62133090 U JP S62133090U JP 2113886 U JP2113886 U JP 2113886U JP 2113886 U JP2113886 U JP 2113886U JP S62133090 U JPS62133090 U JP S62133090U
Authority
JP
Japan
Prior art keywords
body cover
upper body
lower body
cover
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2113886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313036Y2 (US20080293856A1-20081127-C00150.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986021138U priority Critical patent/JPH0313036Y2/ja
Publication of JPS62133090U publication Critical patent/JPS62133090U/ja
Application granted granted Critical
Publication of JPH0313036Y2 publication Critical patent/JPH0313036Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Protection Of Pipes Against Damage, Friction, And Corrosion (AREA)
JP1986021138U 1986-02-17 1986-02-17 Expired JPH0313036Y2 (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986021138U JPH0313036Y2 (US20080293856A1-20081127-C00150.png) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986021138U JPH0313036Y2 (US20080293856A1-20081127-C00150.png) 1986-02-17 1986-02-17

Publications (2)

Publication Number Publication Date
JPS62133090U true JPS62133090U (US20080293856A1-20081127-C00150.png) 1987-08-21
JPH0313036Y2 JPH0313036Y2 (US20080293856A1-20081127-C00150.png) 1991-03-26

Family

ID=30817305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986021138U Expired JPH0313036Y2 (US20080293856A1-20081127-C00150.png) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPH0313036Y2 (US20080293856A1-20081127-C00150.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016176497A (ja) * 2015-03-19 2016-10-06 東京エレクトロン株式会社 連結構造及びこれを用いた排気系、基板処理装置、並びにフランジの取り外し方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004183849A (ja) * 2002-12-06 2004-07-02 Jc Staff:Kk 配管継手部の漏水発見装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55181093U (US20080293856A1-20081127-C00150.png) * 1979-06-15 1980-12-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55181093U (US20080293856A1-20081127-C00150.png) * 1979-06-15 1980-12-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016176497A (ja) * 2015-03-19 2016-10-06 東京エレクトロン株式会社 連結構造及びこれを用いた排気系、基板処理装置、並びにフランジの取り外し方法

Also Published As

Publication number Publication date
JPH0313036Y2 (US20080293856A1-20081127-C00150.png) 1991-03-26

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