JPS62128661U - - Google Patents

Info

Publication number

JPS62128661U

JPS62128661U JP1645086U JP1645086U JPS62128661U JP S62128661 U JPS62128661 U JP S62128661U JP 1645086 U JP1645086 U JP 1645086U JP 1645086 U JP1645086 U JP 1645086U JP S62128661 U JPS62128661 U JP S62128661U

Authority

JP

Japan

Prior art keywords

laser

semiconductor

monitoring

light source

laser light

Prior art date

1986-02-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 9
• 238000012544 monitoring process Methods 0.000 claims description 5
• 230000000903 blocking effect Effects 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 238000005259 measurement Methods 0.000 description 2
• 230000003287 optical effect Effects 0.000 description 1