JPS62127469A - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS62127469A
JPS62127469A JP26478985A JP26478985A JPS62127469A JP S62127469 A JPS62127469 A JP S62127469A JP 26478985 A JP26478985 A JP 26478985A JP 26478985 A JP26478985 A JP 26478985A JP S62127469 A JPS62127469 A JP S62127469A
Authority
JP
Japan
Prior art keywords
laser light
transmitting window
laser beam
photomask
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26478985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478717B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kuniyuki Fukuzawa
福沢　邦之
Mikio Hongo
幹雄 本郷
Takeoki Miyauchi
宮内　建興
Junzo Azuma
淳三 東
Katsuro Mizukoshi
克郎 水越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP26478985A priority Critical patent/JPS62127469A/ja
Publication of JPS62127469A publication Critical patent/JPS62127469A/ja
Publication of JPH0478717B2 publication Critical patent/JPH0478717B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP26478985A 1985-11-27 1985-11-27 気相成長装置 Granted JPS62127469A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26478985A JPS62127469A (ja) 1985-11-27 1985-11-27 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26478985A JPS62127469A (ja) 1985-11-27 1985-11-27 気相成長装置

Publications (2)

Publication Number Publication Date
JPS62127469A true JPS62127469A (ja) 1987-06-09
JPH0478717B2 JPH0478717B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-11

Family

ID=17408220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26478985A Granted JPS62127469A (ja) 1985-11-27 1985-11-27 気相成長装置

Country Status (1)

Country Link
JP (1) JPS62127469A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63277769A (ja) * 1987-05-08 1988-11-15 Fuji Electric Co Ltd 光化学反応利用装置
JP2002284533A (ja) * 2001-03-23 2002-10-03 Sumitomo Electric Ind Ltd ガラス母材の製造方法および製造装置
US6787787B1 (en) 1998-01-23 2004-09-07 Ushiodenki Kabushiki Kaisha Ultraviolet radiation producing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60212220A (ja) * 1984-04-06 1985-10-24 Ushio Inc 光化学反応装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60212220A (ja) * 1984-04-06 1985-10-24 Ushio Inc 光化学反応装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63277769A (ja) * 1987-05-08 1988-11-15 Fuji Electric Co Ltd 光化学反応利用装置
US6787787B1 (en) 1998-01-23 2004-09-07 Ushiodenki Kabushiki Kaisha Ultraviolet radiation producing apparatus
JP2002284533A (ja) * 2001-03-23 2002-10-03 Sumitomo Electric Ind Ltd ガラス母材の製造方法および製造装置

Also Published As

Publication number Publication date
JPH0478717B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-11

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