JPS62126764U - - Google Patents

Info

Publication number

JPS62126764U

JPS62126764U JP1487186U JP1487186U JPS62126764U JP S62126764 U JPS62126764 U JP S62126764U JP 1487186 U JP1487186 U JP 1487186U JP 1487186 U JP1487186 U JP 1487186U JP S62126764 U JPS62126764 U JP S62126764U

Authority

JP

Japan

Prior art keywords

fixing film

oxygen fixing

film formed

oxygen

transistor

Prior art date

1986-02-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
• 239000001301 oxygen Substances 0.000 claims description 4
• 229910052760 oxygen Inorganic materials 0.000 claims description 4
• XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 3
• 239000004202 carbamide Substances 0.000 claims description 3
• 150000002926 oxygen Chemical class 0.000 claims description 3
• 230000005669 field effect Effects 0.000 claims 1
• 239000000758 substrate Substances 0.000 description 1