JPS6212537Y2 - - Google Patents

Info

Publication number
JPS6212537Y2
JPS6212537Y2 JP1982141894U JP14189482U JPS6212537Y2 JP S6212537 Y2 JPS6212537 Y2 JP S6212537Y2 JP 1982141894 U JP1982141894 U JP 1982141894U JP 14189482 U JP14189482 U JP 14189482U JP S6212537 Y2 JPS6212537 Y2 JP S6212537Y2
Authority
JP
Japan
Prior art keywords
surface plate
workpiece
air chamber
compressed air
cylinder tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982141894U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5946664U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982141894U priority Critical patent/JPS5946664U/ja
Publication of JPS5946664U publication Critical patent/JPS5946664U/ja
Application granted granted Critical
Publication of JPS6212537Y2 publication Critical patent/JPS6212537Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1982141894U 1982-09-21 1982-09-21 両面加工装置 Granted JPS5946664U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982141894U JPS5946664U (ja) 1982-09-21 1982-09-21 両面加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982141894U JPS5946664U (ja) 1982-09-21 1982-09-21 両面加工装置

Publications (2)

Publication Number Publication Date
JPS5946664U JPS5946664U (ja) 1984-03-28
JPS6212537Y2 true JPS6212537Y2 (enEXAMPLES) 1987-04-01

Family

ID=30317214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982141894U Granted JPS5946664U (ja) 1982-09-21 1982-09-21 両面加工装置

Country Status (1)

Country Link
JP (1) JPS5946664U (enEXAMPLES)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62120966A (ja) * 1985-11-19 1987-06-02 Haruchika Seimitsu:Kk レンズ自動研磨装置におけるレンズ搬送機構
US5762543A (en) * 1995-11-30 1998-06-09 Speedfam Corporation Polishing apparatus with improved product unloading
JP2003159645A (ja) * 2001-11-22 2003-06-03 Sumitomo Mitsubishi Silicon Corp 研磨装置
JP6635840B2 (ja) * 2016-03-24 2020-01-29 浜井産業株式会社 剥離装置、平面研磨装置および剥離方法
JP7612933B1 (ja) * 2024-07-09 2025-01-14 株式会社レゾナック・ハードディスク 円盤状基板の製造装置及び円盤状基板の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821652Y2 (ja) * 1978-08-28 1983-05-09 日本電気株式会社 研摩装置

Also Published As

Publication number Publication date
JPS5946664U (ja) 1984-03-28

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