JPS62124846U - - Google Patents

Info

Publication number

JPS62124846U

JPS62124846U JP43087U JP43087U JPS62124846U JP S62124846 U JPS62124846 U JP S62124846U JP 43087 U JP43087 U JP 43087U JP 43087 U JP43087 U JP 43087U JP S62124846 U JPS62124846 U JP S62124846U

Authority

JP

Japan

Prior art keywords

semiconductor layer

semiconductor

mesa groove

ring

conductivity type

Prior art date

1987-01-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 11
• 239000000758 substrate Substances 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1