JPS62124755U - - Google Patents

Info

Publication number
JPS62124755U
JPS62124755U JP1037186U JP1037186U JPS62124755U JP S62124755 U JPS62124755 U JP S62124755U JP 1037186 U JP1037186 U JP 1037186U JP 1037186 U JP1037186 U JP 1037186U JP S62124755 U JPS62124755 U JP S62124755U
Authority
JP
Japan
Prior art keywords
transport chamber
sample
chamber
wall surface
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1037186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1037186U priority Critical patent/JPS62124755U/ja
Publication of JPS62124755U publication Critical patent/JPS62124755U/ja
Pending legal-status Critical Current

Links

JP1037186U 1986-01-29 1986-01-29 Pending JPS62124755U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1037186U JPS62124755U (US08063081-20111122-C00044.png) 1986-01-29 1986-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1037186U JPS62124755U (US08063081-20111122-C00044.png) 1986-01-29 1986-01-29

Publications (1)

Publication Number Publication Date
JPS62124755U true JPS62124755U (US08063081-20111122-C00044.png) 1987-08-07

Family

ID=30796596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1037186U Pending JPS62124755U (US08063081-20111122-C00044.png) 1986-01-29 1986-01-29

Country Status (1)

Country Link
JP (1) JPS62124755U (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023182490A (ja) * 2022-06-14 2023-12-26 株式会社Anmic 大気遮断装置及び大気非暴露搬送方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023182490A (ja) * 2022-06-14 2023-12-26 株式会社Anmic 大気遮断装置及び大気非暴露搬送方法

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