JPS62124485A - Semiconductor radiation detector - Google Patents

Semiconductor radiation detector

Info

Publication number
JPS62124485A
JPS62124485A JP60263882A JP26388285A JPS62124485A JP S62124485 A JPS62124485 A JP S62124485A JP 60263882 A JP60263882 A JP 60263882A JP 26388285 A JP26388285 A JP 26388285A JP S62124485 A JPS62124485 A JP S62124485A
Authority
JP
Japan
Prior art keywords
signal
noise
semiconductor
electrodes
shot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60263882A
Other languages
Japanese (ja)
Inventor
Tetsuya Kawamoto
川元 哲也
Mitsuo Ishibashi
石橋 三男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60263882A priority Critical patent/JPS62124485A/en
Publication of JPS62124485A publication Critical patent/JPS62124485A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the sensitivity by removing a noise current of low frequency characteristic to a semiconductor detector by a one-shot circuit and outputting only signal currents inputted from a couple of one-shot circuits at the same time by a simultaneous counting circuit. CONSTITUTION:Signal pulse is and a noise current in are amplified by amplifiers 7 and 7' and outputted to one-shot circuits 10 and 10'. The one-shot circuits 10 and 10' operates only with a fast-rising signal (high frequency signal) and does not respond to the noise signal of low frequency, so the one-shot circuits 10 and 10' output the signal pulses Is and a noise N induced on a signal line, so that the noise signal in is removed. Then, the simultaneous counting circuit 11 judges the outputs of the one-shot circuits 10 and 10' to output only the signal pulses Is which are inputted at the same time to a counting circuit 9 and remove the induced noise N because it is not inputted at the same time. Thus, noises characteristics to the semiconductor detector can be removed, so even low-energy radiation is detected.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、半導体放射線検出器に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to semiconductor radiation detectors.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

半導体放射線検出器として、シリコンまたはゲルマニウ
ムの板を用いたpn接合形のものが知られている。例え
ば第4図に示すように、シリコン板上のn層(3)と2
層(5)との間に、電極(1)、(2)を介してpn接
合に対して逆バイアスとなるような電圧■を印加すると
、空乏層(4)が拡がる。この空乏層(4)に放射線(
6)が入射すると、電子・正孔対が発生し、印加電圧に
よって正孔は電極(2)へ、電子は電極(1)へ運ばれ
、パルス電流が流れる。
A pn junction type semiconductor radiation detector using a silicon or germanium plate is known as a semiconductor radiation detector. For example, as shown in Figure 4, the n-layer (3) and 2
When a voltage (2) that provides a reverse bias to the pn junction is applied between the layer (5) and the pn junction via the electrodes (1) and (2), the depletion layer (4) expands. This depletion layer (4) is exposed to radiation (
6), electron-hole pairs are generated, and the applied voltage carries the holes to the electrode (2) and the electrons to the electrode (1), causing a pulse current to flow.

このパルス電流をプリアンプ(7)で増幅し、ディスク
リアンプ(8)で波高弁別し、計数回路(9)で放射線
レベルを測定する。
This pulse current is amplified by a preamplifier (7), the wave height is discriminated by a disc amplifier (8), and the radiation level is measured by a counting circuit (9).

このような半導体放射線検出器を用いて低計数率の放射
線を検出する場合、計数効率を高めるために表面積を広
くする必要があったが、表面積が大きくなるとpn接合
の表面リーク電流が大きくなり、ノイズが増大して低エ
ネルギーの放射線の検出ができないという欠点があった
When detecting radiation with a low counting rate using such a semiconductor radiation detector, it was necessary to increase the surface area to increase counting efficiency, but as the surface area increases, the surface leakage current of the pn junction increases. This method had the disadvantage that low-energy radiation could not be detected due to increased noise.

〔発明の目的〕[Purpose of the invention]

本発明は、検出器の固有のノイズに影響されず低エネル
ギーの放射線まで検出可能な半導体放射線検出器を提供
することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor radiation detector capable of detecting even low-energy radiation without being affected by noise inherent in the detector.

〔発明の概要〕[Summary of the invention]

本発明は、半導体放射線検出器において、牛馬体板のp
’n層のうちの一方例えばn層の表面に複数の電極を設
けるとともに他方の例えば2層には1個の電極を設けて
各電極を介して2層とn層との間に逆バイアス電圧を印
加し、且つ前記複数の電極を2群に分け、群ごとにまと
めてプリアンプを介してワンショット回路に接続し、こ
の一対のワンショット回路の出力を同時計数回路を介し
て計数回路に接続するように構成したことにより、ワン
ショット回路で半導体検出器固有の低周波の雑音電流を
除き、同時計数回路により一対のワンショット回路から
同時に入力された信号電流のみを計数回路に出力し、各
信号ラインに誘導された誘導ノイズは同時に入力されな
いことによってカットし、低エネルギーの放射線まで検
出可能としたものである。
The present invention provides a semiconductor radiation detector in which p of a bovine and horse body plate is
'A plurality of electrodes are provided on the surface of one of the n layers, for example, the n layer, and one electrode is provided on the other, for example, the 2nd layer, and a reverse bias voltage is applied between the 2nd layer and the n layer via each electrode. is applied, and the plurality of electrodes are divided into two groups, each group is connected to a one-shot circuit via a preamplifier, and the output of this pair of one-shot circuits is connected to a counting circuit via a coincidence counting circuit. By configuring this to The induced noise induced in the signal line is cut by not being input at the same time, making it possible to detect even low-energy radiation.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.

本発明に係る半導体放射線検出器を第1図に示す。pn
接合が形成さ九たシリコン板のp’n層のうち一方例え
ばn層(3)の表面に複数の電極(a、)。
A semiconductor radiation detector according to the present invention is shown in FIG. pn
A plurality of electrodes (a,) are formed on the surface of one of the p'n layers of the silicon plate, for example the n layer (3), on which the junction is formed.

(a2)・・・(an)が入射する放射線の平均飛程よ
り短い間隔で設けられている。また、p’n層のうちの
他方の2層(5)の表面には1個の電極(2)が設けら
れている。各電極(a、)、(a2)・・・(an)と
電極(2)間に逆バイアス電圧■を印加する。そして、
複数の電極(a□)、(a、)・・・(an)を2群、
例えば奇数番目と偶数番目との2群に分け、偶数番目の
電極の群をまとめてプリアンプ(7)を介してワンショ
ット回路(10)に接続し、奇数番目の電極の群をまと
めてプリアンプ(7′)を介してワンショット回路(1
0’)に接続する。さらに、一対のワンショット回路(
10) 、 (1o’)の出力を同時計数回路(11)
を介して計数回路(9)に接続する。
(a2)...(an) are provided at intervals shorter than the average range of the incident radiation. Moreover, one electrode (2) is provided on the surface of the other two layers (5) of the p'n layers. A reverse bias voltage (■) is applied between each electrode (a,), (a2), . . . (an) and electrode (2). and,
Two groups of multiple electrodes (a□), (a,)...(an),
For example, divide the electrodes into two groups, odd-numbered and even-numbered, connect the even-numbered electrodes together to the one-shot circuit (10) via the preamplifier (7), and connect the odd-numbered electrodes together to the preamplifier (10). 7') through the one-shot circuit (1
0'). In addition, a pair of one-shot circuits (
10), (1o') output to coincidence circuit (11)
Connect to the counting circuit (9) via.

上記のように構成された本発明一実施例の半導体放射線
検出器の作用を説明する。一般に半導体放射線検出器に
逆バイアス電圧を印加して使用する場合、雑音電流はl
n=&ゴで表わされる。
The operation of the semiconductor radiation detector according to one embodiment of the present invention configured as described above will be explained. Generally, when a semiconductor radiation detector is used with a reverse bias voltage applied, the noise current is l
It is expressed as n=&go.

ここでe:電子の電荷、■、:リーク電流、B:雑音帯
域幅である。
Here, e: electron charge, ■: leakage current, and B: noise bandwidth.

電極(a□)、(a、)・・・(an)の相互間の間隔
を空乏層(4)に入射した放射線の平均飛程より短かく
したことにより、放射線(6)により発生した電子は信
号パルスとしてプリアンプ(7)および(7′)に等し
く入力される。この信号電流は高周波成分(〜1o8H
z)を持ったものであり、一方、雑音電流inは低周波
成分(〜102Hz)を持ったものであり、この様子を
第2図(a)、(b)に示す。図中、isは信号パルス
、inは雑音電流である。
By making the distance between the electrodes (a□), (a,)...(an) shorter than the average range of the radiation incident on the depletion layer (4), the electrons generated by the radiation (6) are equally input to preamplifiers (7) and (7') as signal pulses. This signal current has high frequency components (~1o8H
On the other hand, the noise current in has a low frequency component (~102 Hz), and this state is shown in FIGS. 2(a) and 2(b). In the figure, is represents a signal pulse, and in represents a noise current.

この信号パルス18および雑音電流inをプリアンプ(
7)および(7′)で増幅し、ワンショット回路(1o
)および(10’ )へ出力する。ワンショッ1へ回路
(1o)および(10’)は立上りの早い信号(高周波
信号)のみで動作し、低周波の雑音電流には応答しない
ので、ワンショット回路(10)および(10’)の出
力は、第2図(c)、(d)に示すように信号パルスI
sと信号ラインに誘導された誘導ノイズNとなり、雑音
電流i、、は除去される。そして、同時計数回路(11
)はワンショット回路(10)および(10’)の出方
を判断し、同時に入力された信号パルスエSのみを計数
回路(9)に出力し、誘導ノイズNは同時に入力されな
いことによって除去される。この様子を第2図(e)に
示す。同時計数回路(11)がら信号パルスエSのみを
送られた計数回路(9)で放射線のレベルを測定する。
This signal pulse 18 and noise current in are preamplified (
7) and (7'), and one-shot circuit (1o
) and (10'). To one-shot circuit 1 Since circuits (1o) and (10') operate only with fast-rising signals (high-frequency signals) and do not respond to low-frequency noise current, the output of one-shot circuits (10) and (10') is the signal pulse I as shown in Fig. 2(c) and (d).
s and the induced noise N induced in the signal line, and the noise current i, , is removed. Then, the coincidence circuit (11
) judges the output of the one-shot circuits (10) and (10') and outputs only the signal pulses S that are input at the same time to the counting circuit (9), and the induced noise N is removed by not inputting them at the same time. . This situation is shown in FIG. 2(e). The radiation level is measured by the counting circuit (9) to which only the signal pulse S is sent from the coincidence counting circuit (11).

上記のように、本発明の一実施例の半導体放射線検出器
では、半導体検出器の固有の雑音を除去できるので、低
エネルギーの放射線まで検出することが可能となる。ま
た、pn接合の表面リーク電流に依存する雑音電流j、
、を除去できるため、半導体検出器の表面積を大きくす
ることができ、高感度の検出器を実現できる。
As described above, the semiconductor radiation detector according to the embodiment of the present invention can remove noise inherent in semiconductor detectors, and therefore can detect even low-energy radiation. In addition, the noise current j, which depends on the surface leakage current of the pn junction,
, can be removed, the surface area of the semiconductor detector can be increased, and a highly sensitive detector can be realized.

なお、半導体のn層(3)表面における複数の電極の配
置態様は、例えば第3図(a) 、 (b) 、 (c
) 、 (d)に示すようなパターンが可能である。各
図中、塗りつぶして示した電極(E)とドツトを付して
示した電極(E′)とは、複数の電極の群分けの状況を
示している。また、各回はパターンを示すもので、電極
の数は一例であって図示のとおりに規定するものではな
い。
The arrangement of the plurality of electrodes on the surface of the semiconductor n-layer (3) is shown in FIGS. 3(a), (b), and (c), for example.
) and (d) are possible. In each figure, the filled electrode (E) and the dotted electrode (E') indicate the grouping of a plurality of electrodes. Further, each time indicates a pattern, and the number of electrodes is an example and is not defined as shown.

〔発明の効果〕〔Effect of the invention〕

以上詳述したように本発明によれば、半導体放射線検出
器において、半導体板のp’n層のうちの一方例えばn
層の表面に複数の電極を設けるとともに他方の例えば2
層には1個の電極を設けて各電極を介して2層とn層と
の間に逆バイアス電圧を印加し、且つ前記複数の電極を
2群に分け、群ごとにまとめてプリアンプを介してワン
ショット回路に接続し、この一対のワンショット回路の
出力を同時計数回路を介して計数回路に接続するように
構成したことにより、ワンショット回路で半導体検出器
固有の低周波の雑音電流を除き、同時計数回路により一
対のワンショット回路から同時に入力された信号電流の
みを計数回路に出力し、各信号ラインに誘導された誘導
ノイズは同時に入力されないことによってカットするこ
とができるので、雑音の影響なく低エネルギーの放射線
まで検出可能となる。また、pn接合の表面リーク電流
に依存する雑音電流を除去できるため、半導体検出器の
表面積を大きくすることができ、高感度の検出器を実現
することができる。
As described in detail above, according to the present invention, in a semiconductor radiation detector, one of the p'n layers of the semiconductor plate, for example, n
A plurality of electrodes are provided on the surface of the layer, and the other one, e.g.
One electrode is provided in each layer, and a reverse bias voltage is applied between the second layer and the n layer through each electrode, and the plurality of electrodes are divided into two groups, and each group is connected together through a preamplifier. By connecting the pair of one-shot circuits to a one-shot circuit and connecting the outputs of this pair of one-shot circuits to a counting circuit via a coincidence circuit, the one-shot circuit can eliminate the low-frequency noise current inherent in semiconductor detectors. The coincidence counting circuit outputs only the signal currents input simultaneously from a pair of one-shot circuits to the counting circuit, and the induced noise induced in each signal line can be cut by not inputting them simultaneously. Even low-energy radiation can be detected without any effects. Further, since the noise current depending on the surface leakage current of the pn junction can be removed, the surface area of the semiconductor detector can be increased, and a highly sensitive detector can be realized.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る半導体放射線検出器の一実施例を
示すブロック接続図、第2図(a)、(b)。 (c) 、 (d) 、 (e)はそれぞれ第1図の検
出器の動作説明図で、第2図(a)、(b)はプリアン
プの入力、第2図(c)、(d)はワンショット回路の
出力、第2図(、)は同時計数回路の出力をそれぞれ示
す波形図、第3図(a) 、 (b) 、 (C) 、
 (d)はそれぞれ複数の電極のn層表面における配置
の異なるパターンを示す図、第4図は従来の半導体放射
線検出器の構成を示すブロック接続図である。
FIG. 1 is a block connection diagram showing an embodiment of a semiconductor radiation detector according to the present invention, and FIGS. 2(a) and (b). (c), (d), and (e) are respectively explanatory diagrams of the operation of the detector in Fig. 1, and Fig. 2 (a) and (b) are the inputs of the preamplifier, and Fig. 2 (c) and (d) is the output of the one-shot circuit, Figure 2 (,) is a waveform diagram showing the output of the coincidence circuit, Figure 3 (a), (b), (C),
(d) is a diagram showing different patterns of arrangement of a plurality of electrodes on the n-layer surface, and FIG. 4 is a block connection diagram showing the configuration of a conventional semiconductor radiation detector.

Claims (1)

【特許請求の範囲】[Claims] 半導体板にpn接合を形成し前記半導体の両面に設けた
電極を介して印加した逆バイアス電圧により生ずる空乏
層内への放射線の入射により発生する電子・正孔対を前
記電極により電流として取り出す半導体放射線検出器に
おいて、前記半導体板のp・n層のうちの一方の層の表
面に複数の電極を入射する放射線の平均飛程より短かい
間隔で設けるとともに半導体板の他方の層の表面に1個
あるいは複数の電極を設け各電極を介してp層とn層と
の間に逆バイアス電圧を印加し且つ前記複数の電極を2
群に分け群ごとにまとめてプリアンプを介してワンショ
ット回路に接続し、この一対のワンショット回路の出力
を同時計数回路を介して計数回路に接続したことを特徴
とする半導体放射線検出器。
A semiconductor in which a pn junction is formed in a semiconductor plate and electron-hole pairs generated by the incidence of radiation into a depletion layer caused by a reverse bias voltage applied through electrodes provided on both sides of the semiconductor are extracted as a current by the electrodes. In the radiation detector, a plurality of electrodes are provided on the surface of one of the p/n layers of the semiconductor board at intervals shorter than the average range of the incident radiation, and one electrode is provided on the surface of the other layer of the semiconductor board. A reverse bias voltage is applied between the p layer and the n layer through each electrode, and the plurality of electrodes are
A semiconductor radiation detector characterized in that each group is divided into groups and connected to a one-shot circuit via a preamplifier, and the outputs of the pair of one-shot circuits are connected to a counting circuit via a coincidence circuit.
JP60263882A 1985-11-26 1985-11-26 Semiconductor radiation detector Pending JPS62124485A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60263882A JPS62124485A (en) 1985-11-26 1985-11-26 Semiconductor radiation detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60263882A JPS62124485A (en) 1985-11-26 1985-11-26 Semiconductor radiation detector

Publications (1)

Publication Number Publication Date
JPS62124485A true JPS62124485A (en) 1987-06-05

Family

ID=17395553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60263882A Pending JPS62124485A (en) 1985-11-26 1985-11-26 Semiconductor radiation detector

Country Status (1)

Country Link
JP (1) JPS62124485A (en)

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