JPS62121762U - - Google Patents

Info

Publication number
JPS62121762U
JPS62121762U JP928386U JP928386U JPS62121762U JP S62121762 U JPS62121762 U JP S62121762U JP 928386 U JP928386 U JP 928386U JP 928386 U JP928386 U JP 928386U JP S62121762 U JPS62121762 U JP S62121762U
Authority
JP
Japan
Prior art keywords
ion source
flange
arc chamber
supporting
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP928386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP928386U priority Critical patent/JPS62121762U/ja
Publication of JPS62121762U publication Critical patent/JPS62121762U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP928386U 1986-01-24 1986-01-24 Pending JPS62121762U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP928386U JPS62121762U (US20100223739A1-20100909-C00005.png) 1986-01-24 1986-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP928386U JPS62121762U (US20100223739A1-20100909-C00005.png) 1986-01-24 1986-01-24

Publications (1)

Publication Number Publication Date
JPS62121762U true JPS62121762U (US20100223739A1-20100909-C00005.png) 1987-08-01

Family

ID=30794452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP928386U Pending JPS62121762U (US20100223739A1-20100909-C00005.png) 1986-01-24 1986-01-24

Country Status (1)

Country Link
JP (1) JPS62121762U (US20100223739A1-20100909-C00005.png)

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