JPS62121727U - - Google Patents

Info

Publication number

JPS62121727U

JPS62121727U JP925686U JP925686U JPS62121727U JP S62121727 U JPS62121727 U JP S62121727U JP 925686 U JP925686 U JP 925686U JP 925686 U JP925686 U JP 925686U JP S62121727 U JPS62121727 U JP S62121727U

Authority

JP

Japan

Prior art keywords

layer

insulating film

silicon dioxide

membrane switch

transparent membrane

Prior art date

1986-01-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011521 glass Substances 0.000 claims description 3
• 239000012528 membrane Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
• 235000012239 silicon dioxide Nutrition 0.000 claims 2
• 239000000377 silicon dioxide Substances 0.000 claims 2
• 239000004408 titanium dioxide Substances 0.000 claims 1