JPS62120340U - - Google Patents

Info

Publication number
JPS62120340U
JPS62120340U JP747186U JP747186U JPS62120340U JP S62120340 U JPS62120340 U JP S62120340U JP 747186 U JP747186 U JP 747186U JP 747186 U JP747186 U JP 747186U JP S62120340 U JPS62120340 U JP S62120340U
Authority
JP
Japan
Prior art keywords
wafers
rows
supporting
furnace core
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP747186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510352Y2 (US20020051482A1-20020502-M00057.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986007471U priority Critical patent/JPH0510352Y2/ja
Publication of JPS62120340U publication Critical patent/JPS62120340U/ja
Application granted granted Critical
Publication of JPH0510352Y2 publication Critical patent/JPH0510352Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986007471U 1986-01-21 1986-01-21 Expired - Lifetime JPH0510352Y2 (US20020051482A1-20020502-M00057.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986007471U JPH0510352Y2 (US20020051482A1-20020502-M00057.png) 1986-01-21 1986-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986007471U JPH0510352Y2 (US20020051482A1-20020502-M00057.png) 1986-01-21 1986-01-21

Publications (2)

Publication Number Publication Date
JPS62120340U true JPS62120340U (US20020051482A1-20020502-M00057.png) 1987-07-30
JPH0510352Y2 JPH0510352Y2 (US20020051482A1-20020502-M00057.png) 1993-03-15

Family

ID=30790952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986007471U Expired - Lifetime JPH0510352Y2 (US20020051482A1-20020502-M00057.png) 1986-01-21 1986-01-21

Country Status (1)

Country Link
JP (1) JPH0510352Y2 (US20020051482A1-20020502-M00057.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49114347A (US20020051482A1-20020502-M00057.png) * 1973-02-28 1974-10-31
JPS57167625A (en) * 1980-11-24 1982-10-15 Ee Esu Kiyuu Bootsu Inc Quartz boat for machining semiconductor wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49114347A (US20020051482A1-20020502-M00057.png) * 1973-02-28 1974-10-31
JPS57167625A (en) * 1980-11-24 1982-10-15 Ee Esu Kiyuu Bootsu Inc Quartz boat for machining semiconductor wafer

Also Published As

Publication number Publication date
JPH0510352Y2 (US20020051482A1-20020502-M00057.png) 1993-03-15

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