JPS62120338U - - Google Patents

Info

Publication number
JPS62120338U
JPS62120338U JP661786U JP661786U JPS62120338U JP S62120338 U JPS62120338 U JP S62120338U JP 661786 U JP661786 U JP 661786U JP 661786 U JP661786 U JP 661786U JP S62120338 U JPS62120338 U JP S62120338U
Authority
JP
Japan
Prior art keywords
thin film
ionization
forming
section
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP661786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP661786U priority Critical patent/JPS62120338U/ja
Publication of JPS62120338U publication Critical patent/JPS62120338U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP661786U 1986-01-22 1986-01-22 Pending JPS62120338U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP661786U JPS62120338U (enrdf_load_stackoverflow) 1986-01-22 1986-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP661786U JPS62120338U (enrdf_load_stackoverflow) 1986-01-22 1986-01-22

Publications (1)

Publication Number Publication Date
JPS62120338U true JPS62120338U (enrdf_load_stackoverflow) 1987-07-30

Family

ID=30789302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP661786U Pending JPS62120338U (enrdf_load_stackoverflow) 1986-01-22 1986-01-22

Country Status (1)

Country Link
JP (1) JPS62120338U (enrdf_load_stackoverflow)

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