JPS62119308U - - Google Patents

Info

Publication number
JPS62119308U
JPS62119308U JP726286U JP726286U JPS62119308U JP S62119308 U JPS62119308 U JP S62119308U JP 726286 U JP726286 U JP 726286U JP 726286 U JP726286 U JP 726286U JP S62119308 U JPS62119308 U JP S62119308U
Authority
JP
Japan
Prior art keywords
wafer
belt
transport
drive unit
abutting member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP726286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP726286U priority Critical patent/JPS62119308U/ja
Publication of JPS62119308U publication Critical patent/JPS62119308U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Structure Of Belt Conveyors (AREA)
JP726286U 1986-01-23 1986-01-23 Pending JPS62119308U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP726286U JPS62119308U (US07943777-20110517-C00090.png) 1986-01-23 1986-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP726286U JPS62119308U (US07943777-20110517-C00090.png) 1986-01-23 1986-01-23

Publications (1)

Publication Number Publication Date
JPS62119308U true JPS62119308U (US07943777-20110517-C00090.png) 1987-07-29

Family

ID=30790553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP726286U Pending JPS62119308U (US07943777-20110517-C00090.png) 1986-01-23 1986-01-23

Country Status (1)

Country Link
JP (1) JPS62119308U (US07943777-20110517-C00090.png)

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