JPS62118442U - - Google Patents

Info

Publication number
JPS62118442U
JPS62118442U JP668186U JP668186U JPS62118442U JP S62118442 U JPS62118442 U JP S62118442U JP 668186 U JP668186 U JP 668186U JP 668186 U JP668186 U JP 668186U JP S62118442 U JPS62118442 U JP S62118442U
Authority
JP
Japan
Prior art keywords
semiconductor pellet
pattern
inspection jig
image
mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP668186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP668186U priority Critical patent/JPS62118442U/ja
Publication of JPS62118442U publication Critical patent/JPS62118442U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP668186U 1986-01-20 1986-01-20 Pending JPS62118442U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP668186U JPS62118442U (US20080293856A1-20081127-C00150.png) 1986-01-20 1986-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP668186U JPS62118442U (US20080293856A1-20081127-C00150.png) 1986-01-20 1986-01-20

Publications (1)

Publication Number Publication Date
JPS62118442U true JPS62118442U (US20080293856A1-20081127-C00150.png) 1987-07-28

Family

ID=30789421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP668186U Pending JPS62118442U (US20080293856A1-20081127-C00150.png) 1986-01-20 1986-01-20

Country Status (1)

Country Link
JP (1) JPS62118442U (US20080293856A1-20081127-C00150.png)

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