JPS62112146U - - Google Patents

Info

Publication number
JPS62112146U
JPS62112146U JP45686U JP45686U JPS62112146U JP S62112146 U JPS62112146 U JP S62112146U JP 45686 U JP45686 U JP 45686U JP 45686 U JP45686 U JP 45686U JP S62112146 U JPS62112146 U JP S62112146U
Authority
JP
Japan
Prior art keywords
storage box
wafer storage
ventilation
lid
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP45686U priority Critical patent/JPS62112146U/ja
Publication of JPS62112146U publication Critical patent/JPS62112146U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP45686U 1986-01-07 1986-01-07 Pending JPS62112146U (US06818201-20041116-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP45686U JPS62112146U (US06818201-20041116-C00086.png) 1986-01-07 1986-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45686U JPS62112146U (US06818201-20041116-C00086.png) 1986-01-07 1986-01-07

Publications (1)

Publication Number Publication Date
JPS62112146U true JPS62112146U (US06818201-20041116-C00086.png) 1987-07-17

Family

ID=30777445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45686U Pending JPS62112146U (US06818201-20041116-C00086.png) 1986-01-07 1986-01-07

Country Status (1)

Country Link
JP (1) JPS62112146U (US06818201-20041116-C00086.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09134952A (ja) * 1995-11-03 1997-05-20 Jenoptik Ag ウェハ状物体の搬送コンテナ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09134952A (ja) * 1995-11-03 1997-05-20 Jenoptik Ag ウェハ状物体の搬送コンテナ

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