JPS62111530U - - Google Patents

Info

Publication number

JPS62111530U

JPS62111530U JP19945885U JP19945885U JPS62111530U JP S62111530 U JPS62111530 U JP S62111530U JP 19945885 U JP19945885 U JP 19945885U JP 19945885 U JP19945885 U JP 19945885U JP S62111530 U JPS62111530 U JP S62111530U

Authority

JP

Japan

Prior art keywords

piezoelectric element

case

diaphragm

pressure sensor

supported

Prior art date

1985-12-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000036316 preload Effects 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 2
• 238000000605 extraction Methods 0.000 description 1
• 239000012212 insulator Substances 0.000 description 1
• 230000004048 modification Effects 0.000 description 1
• 238000012986 modification Methods 0.000 description 1

Cited By (1)