JPS62109997A - 弁金属の陽極酸化前処理方法 - Google Patents
弁金属の陽極酸化前処理方法Info
- Publication number
- JPS62109997A JPS62109997A JP24982885A JP24982885A JPS62109997A JP S62109997 A JPS62109997 A JP S62109997A JP 24982885 A JP24982885 A JP 24982885A JP 24982885 A JP24982885 A JP 24982885A JP S62109997 A JPS62109997 A JP S62109997A
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen peroxide
- hydrofluoric acid
- acid
- pickling
- nitric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 18
- 239000002184 metal Substances 0.000 title claims abstract description 18
- 230000003647 oxidation Effects 0.000 title claims description 13
- 238000007254 oxidation reaction Methods 0.000 title claims description 13
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 58
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 51
- 238000005554 pickling Methods 0.000 claims abstract description 28
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910017604 nitric acid Inorganic materials 0.000 claims abstract description 18
- 229960002050 hydrofluoric acid Drugs 0.000 claims description 28
- 239000007864 aqueous solution Substances 0.000 claims description 18
- 238000002203 pretreatment Methods 0.000 claims description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 23
- 229910052719 titanium Inorganic materials 0.000 abstract description 23
- 239000010936 titanium Substances 0.000 abstract description 23
- 238000004040 coloring Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 description 10
- 239000000243 solution Substances 0.000 description 9
- XROWMBWRMNHXMF-UHFFFAOYSA-J titanium tetrafluoride Chemical compound [F-].[F-].[F-].[F-].[Ti+4] XROWMBWRMNHXMF-UHFFFAOYSA-J 0.000 description 7
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005406 washing Methods 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000013527 degreasing agent Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 239000013522 chelant Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000009920 chelation Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/10—Other heavy metals
- C23G1/106—Other heavy metals refractory metals
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24982885A JPS62109997A (ja) | 1985-11-07 | 1985-11-07 | 弁金属の陽極酸化前処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24982885A JPS62109997A (ja) | 1985-11-07 | 1985-11-07 | 弁金属の陽極酸化前処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62109997A true JPS62109997A (ja) | 1987-05-21 |
| JPS642200B2 JPS642200B2 (enrdf_load_stackoverflow) | 1989-01-13 |
Family
ID=17198790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24982885A Granted JPS62109997A (ja) | 1985-11-07 | 1985-11-07 | 弁金属の陽極酸化前処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62109997A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02170990A (ja) * | 1988-12-23 | 1990-07-02 | Nkk Corp | チタン材陽極酸化の前処理方法 |
| JP2008208457A (ja) * | 2007-02-15 | 2008-09-11 | Westinghouse Electric Co Llc | 酸洗いされたジルコニウム−ニオブ合金からのニオブの第２相粒子付着物の除去 |
| US7789969B2 (en) | 2006-11-01 | 2010-09-07 | Applied Materials, Inc. | Methods and apparatus for cleaning chamber components |
| US20120211468A1 (en) * | 2000-08-11 | 2012-08-23 | Samantha Tan | System and Method for Cleaning Semiconductor Fabrication Equipment Parts |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3993085A4 (en) | 2019-06-28 | 2022-09-14 | FUJIFILM Corporation | PROCESS FOR MAKING A MOLDING FOR AN ELECTRODE |
| WO2021033690A1 (ja) | 2019-08-19 | 2021-02-25 | 富士フイルム株式会社 | 電極用成形体の製造方法 |
| CN114128007B (zh) | 2019-08-19 | 2024-07-23 | 富士胶片株式会社 | 电极用成型体的制造方法 |
-
1985
- 1985-11-07 JP JP24982885A patent/JPS62109997A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02170990A (ja) * | 1988-12-23 | 1990-07-02 | Nkk Corp | チタン材陽極酸化の前処理方法 |
| US20120211468A1 (en) * | 2000-08-11 | 2012-08-23 | Samantha Tan | System and Method for Cleaning Semiconductor Fabrication Equipment Parts |
| US7789969B2 (en) | 2006-11-01 | 2010-09-07 | Applied Materials, Inc. | Methods and apparatus for cleaning chamber components |
| JP2008208457A (ja) * | 2007-02-15 | 2008-09-11 | Westinghouse Electric Co Llc | 酸洗いされたジルコニウム−ニオブ合金からのニオブの第２相粒子付着物の除去 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS642200B2 (enrdf_load_stackoverflow) | 1989-01-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |