JPS62103367A - Synthesizing method for carbon film - Google Patents

Synthesizing method for carbon film

Info

Publication number
JPS62103367A
JPS62103367A JP60241089A JP24108985A JPS62103367A JP S62103367 A JPS62103367 A JP S62103367A JP 60241089 A JP60241089 A JP 60241089A JP 24108985 A JP24108985 A JP 24108985A JP S62103367 A JPS62103367 A JP S62103367A
Authority
JP
Japan
Prior art keywords
material
carbon film
desirable
method
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60241089A
Inventor
Susumu Fujimori
Norihiro Funakoshi
Original Assignee
Nippon Telegr & Teleph Corp <Ntt>
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegr & Teleph Corp <Ntt> filed Critical Nippon Telegr & Teleph Corp <Ntt>
Priority to JP60241089A priority Critical patent/JPS62103367A/en
Publication of JPS62103367A publication Critical patent/JPS62103367A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To manufacture high quality diamond state carbon film with a good mass productivity in crystalline plane with a good reproducibility using simple equipment, by utilizing a specified method for forming film while using hydrocarbon compd. as material having structure similar to diamond or graphite.
CONSTITUTION: Hydrocarbon compd. having a structure similar to diamond or graphite, or mixture of these is used as material, and gasified by plasma chemical gas phase vapor deposition (CVD) method or thermal decomposition method to obtain a product. This is accumulated on substrate to obtain carbon film. Benzene, adamantane, nobornadien or compd. of these are desirable to the material. Mixed gas obtd. by adding gaseous hydrogen to the material is desirable as the gasified material. Further it is desirable to form carbon film by plasma CVD method and to arrange the substrate on cathode.
COPYRIGHT: (C)1987,JPO&Japio
JP60241089A 1985-10-28 1985-10-28 Synthesizing method for carbon film Pending JPS62103367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60241089A JPS62103367A (en) 1985-10-28 1985-10-28 Synthesizing method for carbon film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60241089A JPS62103367A (en) 1985-10-28 1985-10-28 Synthesizing method for carbon film

Publications (1)

Publication Number Publication Date
JPS62103367A true JPS62103367A (en) 1987-05-13

Family

ID=17069120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60241089A Pending JPS62103367A (en) 1985-10-28 1985-10-28 Synthesizing method for carbon film

Country Status (1)

Country Link
JP (1) JPS62103367A (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0192373A (en) * 1987-09-30 1989-04-11 Ishikawajima Harima Heavy Ind Co Ltd Formation of thin carbon film on raw material having large specific surface by cvd
JPH01501142A (en) * 1986-10-15 1989-04-20
JPH01124402A (en) * 1987-11-10 1989-05-17 Namiki Precision Jewel Co Ltd Production of colored diamond coating decorative article
JPH01126212A (en) * 1987-11-11 1989-05-18 Idemitsu Kosan Co Ltd Production of conductive carbonaceous film
US5290610A (en) * 1992-02-13 1994-03-01 Motorola, Inc. Forming a diamond material layer on an electron emitter using hydrocarbon reactant gases ionized by emitted electrons
US5397558A (en) * 1991-03-26 1995-03-14 Semiconductor Energy Laboratory Co., Ltd. Method of forming diamond or diamond containing carbon film
WO1995017541A1 (en) * 1993-12-22 1995-06-29 Citizen Watch Co., Ltd. Dents for reed in high-speed weaving machine, and method of manufacturing same
EP0763144A1 (en) * 1994-06-03 1997-03-19 Mobil Oil Corporation Carbon-coated barrier films whith increased concentration
JP2953673B2 (en) * 1990-09-28 1999-09-27 シチズン時計株式会社 High-speed loom for reed
WO2008026395A1 (en) * 2006-08-29 2008-03-06 Nippon Oil Corporation Method for forming carbon film
JP2008201982A (en) * 2007-02-22 2008-09-04 Idemitsu Kosan Co Ltd Thin film whose precursor is polyalicyclic compound and its manufacturing process
WO2008108009A1 (en) * 2007-03-07 2008-09-12 Tokyo Institute Of Technology n-TYPE CARBON SEMICONDUCTOR FILM AND SEMICONDUCTOR DEVICE UTILIZING THE SAME
JP2008260670A (en) * 2007-04-13 2008-10-30 Univ Of Electro-Communications Method for producing diamond-like carbon film
WO2011099351A1 (en) * 2010-02-12 2011-08-18 国立大学法人東京大学 Method of synthesizing diamondoids, and diamondoid
JP2017523120A (en) * 2014-05-28 2017-08-17 ユニット セル ダイヤモンド エルエルシーUnit Cell Diamond Llc Diamond unit cell and diamond block by combinatorial synthesis

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS578074A (en) * 1980-06-09 1982-01-16 Shigeyasu Kawamura Formation of three-dimensional carved design on surface of polygonal cylindrical member

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS578074A (en) * 1980-06-09 1982-01-16 Shigeyasu Kawamura Formation of three-dimensional carved design on surface of polygonal cylindrical member

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01501142A (en) * 1986-10-15 1989-04-20
JPH0192373A (en) * 1987-09-30 1989-04-11 Ishikawajima Harima Heavy Ind Co Ltd Formation of thin carbon film on raw material having large specific surface by cvd
JPH01124402A (en) * 1987-11-10 1989-05-17 Namiki Precision Jewel Co Ltd Production of colored diamond coating decorative article
JPH01126212A (en) * 1987-11-11 1989-05-18 Idemitsu Kosan Co Ltd Production of conductive carbonaceous film
JP2953673B2 (en) * 1990-09-28 1999-09-27 シチズン時計株式会社 High-speed loom for reed
US5397558A (en) * 1991-03-26 1995-03-14 Semiconductor Energy Laboratory Co., Ltd. Method of forming diamond or diamond containing carbon film
US5290610A (en) * 1992-02-13 1994-03-01 Motorola, Inc. Forming a diamond material layer on an electron emitter using hydrocarbon reactant gases ionized by emitted electrons
WO1995017541A1 (en) * 1993-12-22 1995-06-29 Citizen Watch Co., Ltd. Dents for reed in high-speed weaving machine, and method of manufacturing same
US5762110A (en) * 1993-12-22 1998-06-09 Citizen Watch Co., Ltd. Dents for reed in high-speed weaving machine, and method of manufacturing same
GB2301119B (en) * 1993-12-22 1997-11-05 Citizen Watch Co Ltd Dents for reed in high-speed weaving machine,and method of manufacturing same
GB2301119A (en) * 1993-12-22 1996-11-27 Citizen Watch Co Ltd Dents for reed in high-speed weaving machine,and method of manufacturing same
CN1045015C (en) * 1993-12-22 1999-09-08 时至准钟表股份有限公司 Dents for reed in high-speed weaving machine, and method of manufacturing same
EP0763144A1 (en) * 1994-06-03 1997-03-19 Mobil Oil Corporation Carbon-coated barrier films whith increased concentration
EP0763144A4 (en) * 1994-06-03 1998-05-20 Mobil Oil Corp Carbon-coated barrier films whith increased concentration
WO2008026395A1 (en) * 2006-08-29 2008-03-06 Nippon Oil Corporation Method for forming carbon film
JP2008201982A (en) * 2007-02-22 2008-09-04 Idemitsu Kosan Co Ltd Thin film whose precursor is polyalicyclic compound and its manufacturing process
WO2008108009A1 (en) * 2007-03-07 2008-09-12 Tokyo Institute Of Technology n-TYPE CARBON SEMICONDUCTOR FILM AND SEMICONDUCTOR DEVICE UTILIZING THE SAME
JP2008260670A (en) * 2007-04-13 2008-10-30 Univ Of Electro-Communications Method for producing diamond-like carbon film
WO2011099351A1 (en) * 2010-02-12 2011-08-18 国立大学法人東京大学 Method of synthesizing diamondoids, and diamondoid
JP2017523120A (en) * 2014-05-28 2017-08-17 ユニット セル ダイヤモンド エルエルシーUnit Cell Diamond Llc Diamond unit cell and diamond block by combinatorial synthesis

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