JPS62103250U - - Google Patents

Info

Publication number

JPS62103250U

JPS62103250U JP19468685U JP19468685U JPS62103250U JP S62103250 U JPS62103250 U JP S62103250U JP 19468685 U JP19468685 U JP 19468685U JP 19468685 U JP19468685 U JP 19468685U JP S62103250 U JPS62103250 U JP S62103250U

Authority

JP

Japan

Prior art keywords

counter electrode

wafer

electrode

etching

stage

Prior art date

1985-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005530 etching Methods 0.000 claims description 9
• 238000004519 manufacturing process Methods 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000001312 dry etching Methods 0.000 description 1
• 238000001039 wet etching Methods 0.000 description 1