JPS62103246U - - Google Patents
Info
- Publication number
- JPS62103246U JPS62103246U JP19354085U JP19354085U JPS62103246U JP S62103246 U JPS62103246 U JP S62103246U JP 19354085 U JP19354085 U JP 19354085U JP 19354085 U JP19354085 U JP 19354085U JP S62103246 U JPS62103246 U JP S62103246U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support
- groove
- support rods
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19354085U JPS62103246U (en:Method) | 1985-12-18 | 1985-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19354085U JPS62103246U (en:Method) | 1985-12-18 | 1985-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62103246U true JPS62103246U (en:Method) | 1987-07-01 |
Family
ID=31149655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19354085U Pending JPS62103246U (en:Method) | 1985-12-18 | 1985-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62103246U (en:Method) |
-
1985
- 1985-12-18 JP JP19354085U patent/JPS62103246U/ja active Pending