JPS62102864U - - Google Patents

Info

Publication number
JPS62102864U
JPS62102864U JP19633185U JP19633185U JPS62102864U JP S62102864 U JPS62102864 U JP S62102864U JP 19633185 U JP19633185 U JP 19633185U JP 19633185 U JP19633185 U JP 19633185U JP S62102864 U JPS62102864 U JP S62102864U
Authority
JP
Japan
Prior art keywords
vacuum pump
stage side
passage
opening
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19633185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH027268Y2 (US07709020-20100504-C00041.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19633185U priority Critical patent/JPH027268Y2/ja
Publication of JPS62102864U publication Critical patent/JPS62102864U/ja
Application granted granted Critical
Publication of JPH027268Y2 publication Critical patent/JPH027268Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP19633185U 1985-12-20 1985-12-20 Expired JPH027268Y2 (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19633185U JPH027268Y2 (US07709020-20100504-C00041.png) 1985-12-20 1985-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19633185U JPH027268Y2 (US07709020-20100504-C00041.png) 1985-12-20 1985-12-20

Publications (2)

Publication Number Publication Date
JPS62102864U true JPS62102864U (US07709020-20100504-C00041.png) 1987-06-30
JPH027268Y2 JPH027268Y2 (US07709020-20100504-C00041.png) 1990-02-21

Family

ID=31155056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19633185U Expired JPH027268Y2 (US07709020-20100504-C00041.png) 1985-12-20 1985-12-20

Country Status (1)

Country Link
JP (1) JPH027268Y2 (US07709020-20100504-C00041.png)

Also Published As

Publication number Publication date
JPH027268Y2 (US07709020-20100504-C00041.png) 1990-02-21

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