JPS62101557U - - Google Patents

Info

Publication number
JPS62101557U
JPS62101557U JP19222285U JP19222285U JPS62101557U JP S62101557 U JPS62101557 U JP S62101557U JP 19222285 U JP19222285 U JP 19222285U JP 19222285 U JP19222285 U JP 19222285U JP S62101557 U JPS62101557 U JP S62101557U
Authority
JP
Japan
Prior art keywords
floor
gas outlet
concave portion
attached
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19222285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19222285U priority Critical patent/JPS62101557U/ja
Publication of JPS62101557U publication Critical patent/JPS62101557U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Ventilation (AREA)
JP19222285U 1985-12-16 1985-12-16 Pending JPS62101557U (US07902200-20110308-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19222285U JPS62101557U (US07902200-20110308-C00004.png) 1985-12-16 1985-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19222285U JPS62101557U (US07902200-20110308-C00004.png) 1985-12-16 1985-12-16

Publications (1)

Publication Number Publication Date
JPS62101557U true JPS62101557U (US07902200-20110308-C00004.png) 1987-06-27

Family

ID=31147095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19222285U Pending JPS62101557U (US07902200-20110308-C00004.png) 1985-12-16 1985-12-16

Country Status (1)

Country Link
JP (1) JPS62101557U (US07902200-20110308-C00004.png)

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