JPS6196691U - - Google Patents

Info

Publication number
JPS6196691U
JPS6196691U JP17993784U JP17993784U JPS6196691U JP S6196691 U JPS6196691 U JP S6196691U JP 17993784 U JP17993784 U JP 17993784U JP 17993784 U JP17993784 U JP 17993784U JP S6196691 U JPS6196691 U JP S6196691U
Authority
JP
Japan
Prior art keywords
interlocking member
cam
gripping
rotary actuator
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17993784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17993784U priority Critical patent/JPS6196691U/ja
Publication of JPS6196691U publication Critical patent/JPS6196691U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP17993784U 1984-11-29 1984-11-29 Pending JPS6196691U (US07582779-20090901-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17993784U JPS6196691U (US07582779-20090901-C00044.png) 1984-11-29 1984-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17993784U JPS6196691U (US07582779-20090901-C00044.png) 1984-11-29 1984-11-29

Publications (1)

Publication Number Publication Date
JPS6196691U true JPS6196691U (US07582779-20090901-C00044.png) 1986-06-21

Family

ID=30737500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17993784U Pending JPS6196691U (US07582779-20090901-C00044.png) 1984-11-29 1984-11-29

Country Status (1)

Country Link
JP (1) JPS6196691U (US07582779-20090901-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07132482A (ja) * 1993-11-02 1995-05-23 Ckd Corp ウェハ把持装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07132482A (ja) * 1993-11-02 1995-05-23 Ckd Corp ウェハ把持装置

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