JPS6196684U - - Google Patents
Info
- Publication number
- JPS6196684U JPS6196684U JP17980084U JP17980084U JPS6196684U JP S6196684 U JPS6196684 U JP S6196684U JP 17980084 U JP17980084 U JP 17980084U JP 17980084 U JP17980084 U JP 17980084U JP S6196684 U JPS6196684 U JP S6196684U
- Authority
- JP
- Japan
- Prior art keywords
- robot
- hand
- silicon wafers
- claw part
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 210000000078 claw Anatomy 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17980084U JPS6196684U (de) | 1984-11-27 | 1984-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17980084U JPS6196684U (de) | 1984-11-27 | 1984-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196684U true JPS6196684U (de) | 1986-06-21 |
Family
ID=30737365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17980084U Pending JPS6196684U (de) | 1984-11-27 | 1984-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196684U (de) |
-
1984
- 1984-11-27 JP JP17980084U patent/JPS6196684U/ja active Pending