JPS6195435U - - Google Patents

Info

Publication number

JPS6195435U

JPS6195435U JP18110684U JP18110684U JPS6195435U JP S6195435 U JPS6195435 U JP S6195435U JP 18110684 U JP18110684 U JP 18110684U JP 18110684 U JP18110684 U JP 18110684U JP S6195435 U JPS6195435 U JP S6195435U

Authority

JP

Japan

Prior art keywords

plasma generation

pipe

microwave

transport pipe

gas transport

Prior art date

1984-11-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000010355 oscillation Effects 0.000 claims description 3
• 230000032258 transport Effects 0.000 claims 4
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1