JPS6188236U - - Google Patents
Info
- Publication number
- JPS6188236U JPS6188236U JP17244584U JP17244584U JPS6188236U JP S6188236 U JPS6188236 U JP S6188236U JP 17244584 U JP17244584 U JP 17244584U JP 17244584 U JP17244584 U JP 17244584U JP S6188236 U JPS6188236 U JP S6188236U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- counter electrode
- vacuum container
- bias voltage
- evacuating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010276 construction Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17244584U JPS6188236U (en:Method) | 1984-11-15 | 1984-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17244584U JPS6188236U (en:Method) | 1984-11-15 | 1984-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6188236U true JPS6188236U (en:Method) | 1986-06-09 |
Family
ID=30730111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17244584U Pending JPS6188236U (en:Method) | 1984-11-15 | 1984-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188236U (en:Method) |
-
1984
- 1984-11-15 JP JP17244584U patent/JPS6188236U/ja active Pending
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