JPS6186462U - - Google Patents

Info

Publication number

JPS6186462U

JPS6186462U JP17115984U JP17115984U JPS6186462U JP S6186462 U JPS6186462 U JP S6186462U JP 17115984 U JP17115984 U JP 17115984U JP 17115984 U JP17115984 U JP 17115984U JP S6186462 U JPS6186462 U JP S6186462U

Authority

JP

Japan

Prior art keywords

silicon wafer

parts

base

back side

bolt parts

Prior art date

1984-11-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
• 229910052710 silicon Inorganic materials 0.000 claims description 8
• 239000010703 silicon Substances 0.000 claims description 8
• 238000005530 etching Methods 0.000 claims description 5
• 238000004519 manufacturing process Methods 0.000 claims description 3
• 239000004809 Teflon Substances 0.000 claims 1
• 229920006362 Teflon® Polymers 0.000 claims 1
• NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
• 239000011521 glass Substances 0.000 description 1