JPS6186459U - - Google Patents

Info

Publication number

JPS6186459U

JPS6186459U JP17266684U JP17266684U JPS6186459U JP S6186459 U JPS6186459 U JP S6186459U JP 17266684 U JP17266684 U JP 17266684U JP 17266684 U JP17266684 U JP 17266684U JP S6186459 U JPS6186459 U JP S6186459U

Authority

JP

Japan

Prior art keywords

target

magnetic field

substrate holder

substrate

processed

Prior art date

1984-11-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 5
• 238000004544 sputter deposition Methods 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 1