JPS618569B2 - - Google Patents

Info

Publication number
JPS618569B2
JPS618569B2 JP9174477A JP9174477A JPS618569B2 JP S618569 B2 JPS618569 B2 JP S618569B2 JP 9174477 A JP9174477 A JP 9174477A JP 9174477 A JP9174477 A JP 9174477A JP S618569 B2 JPS618569 B2 JP S618569B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9174477A
Other versions
JPS5426664A (en
Inventor
Sokichi Yamagishi
Kazuhide Kunitoku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
NEC Kyushu Ltd
Original Assignee
Nippon Electric Co Ltd
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd, NEC Kyushu Ltd filed Critical Nippon Electric Co Ltd
Priority to JP9174477A priority Critical patent/JPS5426664A/ja
Publication of JPS5426664A publication Critical patent/JPS5426664A/ja
Publication of JPS618569B2 publication Critical patent/JPS618569B2/ja
Granted legal-status Critical Current

Links

JP9174477A 1977-07-29 1977-07-29 Tool for heat treatment of semiconductor wafer Granted JPS5426664A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9174477A JPS5426664A (en) 1977-07-29 1977-07-29 Tool for heat treatment of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9174477A JPS5426664A (en) 1977-07-29 1977-07-29 Tool for heat treatment of semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS5426664A JPS5426664A (en) 1979-02-28
JPS618569B2 true JPS618569B2 (ja) 1986-03-15

Family

ID=14035030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9174477A Granted JPS5426664A (en) 1977-07-29 1977-07-29 Tool for heat treatment of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5426664A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5923464B2 (ja) * 1979-04-18 1984-06-02 テルサ−ムコ株式会社 半導体熱処理装置
FR2583779A1 (fr) * 1985-06-25 1986-12-26 Montaudon Patrick Dispositif pour reduire l'oxydation d'objets places dans une enceinte de traitement gazeux lorsqu'ils en sont extraits
JPH0737310Y2 (ja) * 1987-03-05 1995-08-23 株式会社リコー 熱処理炉
JP4354600B2 (ja) * 1999-12-27 2009-10-28 株式会社日本製鋼所 加熱基板搬送機構及び搬送方法

Also Published As

Publication number Publication date
JPS5426664A (en) 1979-02-28

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