JPS6183912A - 光学式変位測定装置の信号検出機構 - Google Patents

光学式変位測定装置の信号検出機構

Info

Publication number
JPS6183912A
JPS6183912A JP59205854A JP20585484A JPS6183912A JP S6183912 A JPS6183912 A JP S6183912A JP 59205854 A JP59205854 A JP 59205854A JP 20585484 A JP20585484 A JP 20585484A JP S6183912 A JPS6183912 A JP S6183912A
Authority
JP
Japan
Prior art keywords
optical path
detection mechanism
displacement measuring
beam splitter
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59205854A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513243B2 (cs
Inventor
Kayoko Taniguchi
佳代子 谷口
Hideki Tsuchiya
土谷　秀樹
Masaaki Toyama
正明 外山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Magnescale Inc
Original Assignee
Sony Magnescale Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Magnescale Inc filed Critical Sony Magnescale Inc
Priority to JP59205854A priority Critical patent/JPS6183912A/ja
Priority to DE88117622T priority patent/DE3486178T2/de
Priority to DE8484307484T priority patent/DE3484649D1/de
Priority to EP84307484A priority patent/EP0146244B2/en
Priority to EP88117622A priority patent/EP0311144B1/en
Priority to US06/668,097 priority patent/US4676645A/en
Publication of JPS6183912A publication Critical patent/JPS6183912A/ja
Publication of JPH0513243B2 publication Critical patent/JPH0513243B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP59205854A 1983-11-04 1984-10-01 光学式変位測定装置の信号検出機構 Granted JPS6183912A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP59205854A JPS6183912A (ja) 1984-10-01 1984-10-01 光学式変位測定装置の信号検出機構
DE88117622T DE3486178T2 (de) 1983-11-04 1984-10-31 Optisches Instrument zur Messung einer Verschiebung.
DE8484307484T DE3484649D1 (de) 1983-11-04 1984-10-31 Optisches instrument zur messung einer verschiebung.
EP84307484A EP0146244B2 (en) 1983-11-04 1984-10-31 Optical instrument for measuring displacement
EP88117622A EP0311144B1 (en) 1983-11-04 1984-10-31 Optical instrument for measuring displacement
US06/668,097 US4676645A (en) 1983-11-04 1984-11-05 Optical instrument for measuring displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59205854A JPS6183912A (ja) 1984-10-01 1984-10-01 光学式変位測定装置の信号検出機構

Publications (2)

Publication Number Publication Date
JPS6183912A true JPS6183912A (ja) 1986-04-28
JPH0513243B2 JPH0513243B2 (cs) 1993-02-22

Family

ID=16513808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59205854A Granted JPS6183912A (ja) 1983-11-04 1984-10-01 光学式変位測定装置の信号検出機構

Country Status (1)

Country Link
JP (1) JPS6183912A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2343745A (en) * 1998-11-11 2000-05-17 Ando Electric Light receiving circuit for use in electrooptic sampling oscilloscope
JP2008209556A (ja) * 2007-02-26 2008-09-11 Epson Imaging Devices Corp 電気光学装置、半導体装置、表示装置およびこれを備える電子機器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4113381A (en) * 1976-11-18 1978-09-12 Hewlett-Packard Company Surveying instrument and method
JPS5892819A (ja) * 1981-11-28 1983-06-02 Nippon Kogaku Kk <Nikon> 光電式エンコ−ダ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4113381A (en) * 1976-11-18 1978-09-12 Hewlett-Packard Company Surveying instrument and method
JPS5892819A (ja) * 1981-11-28 1983-06-02 Nippon Kogaku Kk <Nikon> 光電式エンコ−ダ装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2343745A (en) * 1998-11-11 2000-05-17 Ando Electric Light receiving circuit for use in electrooptic sampling oscilloscope
US6384590B1 (en) 1998-11-11 2002-05-07 Ando Electric Co., Ltd. Light receiving circuit for use in electro-optic sampling oscilloscope
GB2343745B (en) * 1998-11-11 2003-07-16 Ando Electric Light receiving circuit for use in electro-optic sampling oscilloscope
JP2008209556A (ja) * 2007-02-26 2008-09-11 Epson Imaging Devices Corp 電気光学装置、半導体装置、表示装置およびこれを備える電子機器

Also Published As

Publication number Publication date
JPH0513243B2 (cs) 1993-02-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term