JPS6182082U - - Google Patents

Info

Publication number
JPS6182082U
JPS6182082U JP16566584U JP16566584U JPS6182082U JP S6182082 U JPS6182082 U JP S6182082U JP 16566584 U JP16566584 U JP 16566584U JP 16566584 U JP16566584 U JP 16566584U JP S6182082 U JPS6182082 U JP S6182082U
Authority
JP
Japan
Prior art keywords
pull rod
fork part
spacer
piston
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16566584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16566584U priority Critical patent/JPS6182082U/ja
Publication of JPS6182082U publication Critical patent/JPS6182082U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP16566584U 1984-11-02 1984-11-02 Pending JPS6182082U (US06373033-20020416-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16566584U JPS6182082U (US06373033-20020416-M00002.png) 1984-11-02 1984-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16566584U JPS6182082U (US06373033-20020416-M00002.png) 1984-11-02 1984-11-02

Publications (1)

Publication Number Publication Date
JPS6182082U true JPS6182082U (US06373033-20020416-M00002.png) 1986-05-30

Family

ID=30723505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16566584U Pending JPS6182082U (US06373033-20020416-M00002.png) 1984-11-02 1984-11-02

Country Status (1)

Country Link
JP (1) JPS6182082U (US06373033-20020416-M00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210097643A (ko) 2020-01-29 2021-08-09 엔지케이 인슐레이터 엘티디 치밀질 복합 재료, 그 제법, 접합체 및 반도체 제조 장치용 부재

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210097643A (ko) 2020-01-29 2021-08-09 엔지케이 인슐레이터 엘티디 치밀질 복합 재료, 그 제법, 접합체 및 반도체 제조 장치용 부재

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