JPS6179568A - Dressing device for blade - Google Patents

Abstract

PURPOSE:To perform dressing operation automatically as well as to aim at improvements in work accuracy and an availability factor of a dresser, by tilting a dressing bar wheel to a blade, while rotating this bar wheel and making it shiftingly infeed to the blade. CONSTITUTION:A bar wheel 3 is pressed to a blade 1, while a nut 9 of a screw shaft 8 is attached to a infeed motor 7 on a stationary part 4, and a bearing 10 of a rotary shaft 11 in a rectangular direction to the shaft 8 is installed in a moving block 6, then a rocker plate 14 is attached in a right-angle to the shaft 11. A tip end of a piston rod 13 of a rockable cylinder 12 on the block 6 is pivotally supported on a plate 14, making the shaft 11 turnable. A chuck 16 of the wheel 3 is rotated by a motor inside a box 15 at the left end of the shaft 11, and the chuck 16 is made to go forward by a mobile mechanism inside. When dressing takes place, the wheel 3 is transferred to an inner circumference of an outer circumferential position of the blade 1, and the wheel 3 is tilted to some extent with operation of the cylinder 12, making it move in an arrow 17 direction.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a dressing device for a cutting blade that cuts materials such as silicon in the manufacturing process of electronic components such as semiconductor devices.

The blade used for such cutting is the outer circumference of a disc made of a thin metal plate, or the inner circumference of an annular plate with diamond abrasive grains electrodeposited thereon. Dressing is an operation that corrects clogging and wear and tear of the abrasive grains of the blade caused by continuous processing, and regenerates a sharp cutting knife.

This dressing is a very important operation; if not done in a timely manner, it will impair cutting efficiency, and if done more often than necessary, it will unnecessarily remove abrasive grains and shorten the life of the expensive blade. It turns out. In addition, normally, clogging and wear on both sides of the blade are not uniform, and the cutting resistance is different, so during the cutting process, the blade tends to bend toward the side with lower cutting resistance, which deteriorates the accuracy of the cut surface. do.

In such cases, it is desirable to dress only one of the sides of the blade that is more clogged, or to dress that second side more strongly. It is also possible to measure the length.

Traditionally, dressing has been carried out by cutting a bar-shaped grindstone with a blade that is placed upright against the side surface of the blade in the same manner as cutting the workpiece. The main focus was on modern products, and there were some difficulties in eliminating clogging on both sides of the blade edge and not being able to form them.

On the other hand, a method has been proposed in which the dressing grindstone is tilted at an arbitrary angle with respect to the cutting feed direction of the blade to perform dressing depending on the machinability of both sides of the blade. , inclination angle, depth of cut,
Also, depending on the cutting feed angle, the grinding wheel may interfere with the alloy of the blade, causing damage or deformation, so the inclination angle and depth of cut must be carefully controlled. .

In addition, a method has been devised in which the outer circumferential surface of a cylindrical grindstone is pressed against the abrasive electrodeposited side surface of the blade and rotated due to meshing, but with this method, the tip surface of the blade cannot be dressed. However, there are disadvantages such as the need to rotate the blade at a lower speed than when cutting, and the difficulty in controlling the pressure force applied to the dressing wheel on the blade.In any case, effective and automatic dressing is difficult. There was a problem.

The present invention takes the above circumstances into consideration and provides a device for solving these problems.

- Figure 2 (a), (b), ()1) shows the mechanism of the present invention,
This shows the outline of the process. Insert the grindstone 3 into the hole in the inner peripheral tip 2 of the blade 1 from the vertical movement (I-) direction, move it in the X direction #5 (■), and make a cut with the blade. However, in the present invention, the grinding wheel 3 is tilted at forward and reverse angles in an upright plane including X-Xa in the direction of cut (II>) [hereinafter referred to as X tilt (III
)] A method, rotating the whetstone 3 around the axis
BB method and grindstone 3 in the direction of the cut (II) x-x
Y-Y# perpendicular to st! (hereinafter referred to as X inclination (■)) C
The methods can be implemented selectively, singly, or in combination depending on the deterioration state of the abrasive grain surface of the blade 1.

Here, the dressing states of the A, B, and C methods will be explained using diagrams.

Figure 3 (A) is a conventional, general method in which the cut is cut off or the cut is made halfway through the grindstone, and the main purpose is to eliminate clogging at the tip of the knife. (b), (This is an example in which the glue is cut halfway through the grindstone, and the main purpose is to correct the bending of the blade and correct clogging on the lower or upper surface of the cutting edge, and change the direction of inclination.

Figure 4 is an example of adding the rotation of the grindstone 3 and method B to the X-tilt method A, and in (d), the X-tilt is not performed, the depth of cut is cut off or halfway, and the main problem is clogging of the entire cutting edge. Suitable for correcting buckling and bending of blades by eliminating and forming.

In the case of (E) and (F), this method is mainly suitable for partially forming the lower or upper surface of the blade and the tip corner, and is effective for correcting bends toward the upper or lower surface of the blade.

In the case of FIG. 5, the example in FIG. 4 is further combined with the C method of X inclination, and FIG.
In other words, the combination of B method and C method with X inclination is suitable for uniformly shaping the tip corner of the blade = (H),
(S) is the state when a forward and reverse C slope is added,
It is possible to mold both sides and the tip at the same time. According to the combination method of A, B, and C in Figure rIS5, the side surface of the blade and the corner of the front edge of the image are dressed and shaped at the same time, so the opening time during dressing work is shortened, and the dressing effect on the corner of the front edge of the image is reduced in section y4. It is an extremely efficient method.

Next, embodiments of the apparatus of the present invention that can implement the A, B, and C methods described above will be described with reference to the drawings. In FIG. 1, a movable table 6 is provided on the fixed part 4 and is movable by a guide 5. As shown in FIG. Further, a motor 7 for a mechanism for pressing a bar-shaped grindstone 3 against the blade 1 and cutting it is fixed on the fixed part 4,
Attach nut 9 with M8 screw to this motor. The moving table 6 is provided with a bearing 10 for a rotating shaft 11 that is perpendicular to the screw sleeve 8, and a swing @14 is attached to the pongee 11 at a right angle. On the movable table 6, there is a shilling 1 that can be swung.
2 is installed almost horizontally, and the tip of the piston rod 13 is pivotally supported on the rocking plate 14, and the "
A box 15 is attached to the left end of the two shafts 11 that allow the sleeve 11 to rotate by a desired angle, and a motor is provided inside to rotate the chuck 16 of the bar-shaped grindstone 3. The box 15 is provided with a moving mechanism for moving the chuck 16 forward (downward in the figure) since the tip of the grindstone is cut off each time it is dressed.

When not in use, the pongee 11 is rotated to rotate the center wheel of the grindstone 3 by approximately 90 degrees, and the movable table 6 is moved by rotation of the screw shaft 8 to a position that does not interfere with the wafer cutting operation. . And when dressing,
Move the whetstone to the inner or outer circumference of the blade, operate the cylinder 12' to tilt the whetstone at the desired angle with respect to the blade 1, rotate the motor 7, and move the whetstone in the direction of arrow 1.
Move it in the direction of 7. At this time, Bonx 15
Dressing is performed by rotating the motor inside the grinder and rotating the grindstone.

Furthermore, by moving the piston rod 20 in and out of the shilling 21, the tip of the grindstone rod can be moved around the fulcrum 22.
In FIG. 1, it can be tilted left and right.

In addition, in the above embodiment, an example of application to a vertical cutter with an inner peripheral blade was explained, but the device of the present invention can be similarly applied to both a peripheral blade type and a horizontal type cutting machine. Needless to say.

As detailed above, according to the device of the present invention, the dressing operation can be automatically performed by selecting the optimal method based on various conditions such as the deformation state of the blade, the cutting shape, and the roughness of the cut surface. As a result, it is possible to improve the precision of the workpiece and the operating rate. Further, the wear of the abrasive grains of the blade can be minimized, and the useful life of the blade can be significantly extended.

[Brief explanation of drawings]

Fig. 1 is an explanatory diagram showing one embodiment of the present invention, Fig. 2 is an explanatory diagram of the inclination direction of the grindstone, etc., (a) is a diagram of the relationship between the blade and the grindstone, and (b) is ( A) A view in the direction of arrow A in the figure, (c)
The figure is (a) a view taken in the direction of the arrow in the figure, and FIGS. 3, 4, and 5 are explanatory diagrams showing the relationship between the blade and the grindstone. 1: Inner peripheral blade, 2: End, 3: Grindstone, 5: Guide, 7: Motor, 8: Screw shaft, 9: S/Z, 1
1: Axis, 12 Nijiring, 14: Swing plate, 15: Box with rotation mechanism,

Claims (2)

[Claims] (1) In a cutting machine blade dressing device,
A blade dressing device comprising: a tilting mechanism for tilting a dressing bar-shaped grindstone at an arbitrary angle with respect to the blade; a rotating mechanism for the bar-shaped grindstone; and a moving mechanism for cutting the grindstone into the blade. (2) In the description of claim 1, the inclination mechanism of the bar-shaped grindstone selectively inclines along the cutting movement direction plane and the inclination along the plane perpendicular to this, at right angles to the side surface of the blade. A blade dressing device that can do both at the same time.