JPS6179568A - Dressing device for blade - Google Patents

Dressing device for blade

Info

Publication number
JPS6179568A
JPS6179568A JP59201149A JP20114984A JPS6179568A JP S6179568 A JPS6179568 A JP S6179568A JP 59201149 A JP59201149 A JP 59201149A JP 20114984 A JP20114984 A JP 20114984A JP S6179568 A JPS6179568 A JP S6179568A
Authority
JP
Japan
Prior art keywords
blade
shaft
wheel
dressing
grindstone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59201149A
Other languages
Japanese (ja)
Other versions
JPH04787B2 (en
Inventor
Satoru Minami
南 悟
Katsuo Honda
本多 勝男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP59201149A priority Critical patent/JPS6179568A/en
Publication of JPS6179568A publication Critical patent/JPS6179568A/en
Publication of JPH04787B2 publication Critical patent/JPH04787B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

PURPOSE:To perform dressing operation automatically as well as to aim at improvements in work accuracy and an availability factor of a dresser, by tilting a dressing bar wheel to a blade, while rotating this bar wheel and making it shiftingly infeed to the blade. CONSTITUTION:A bar wheel 3 is pressed to a blade 1, while a nut 9 of a screw shaft 8 is attached to a infeed motor 7 on a stationary part 4, and a bearing 10 of a rotary shaft 11 in a rectangular direction to the shaft 8 is installed in a moving block 6, then a rocker plate 14 is attached in a right-angle to the shaft 11. A tip end of a piston rod 13 of a rockable cylinder 12 on the block 6 is pivotally supported on a plate 14, making the shaft 11 turnable. A chuck 16 of the wheel 3 is rotated by a motor inside a box 15 at the left end of the shaft 11, and the chuck 16 is made to go forward by a mobile mechanism inside. When dressing takes place, the wheel 3 is transferred to an inner circumference of an outer circumferential position of the blade 1, and the wheel 3 is tilted to some extent with operation of the cylinder 12, making it move in an arrow 17 direction.

Description

【発明の詳細な説明】 この発明は、半導体素子等の電子部品の製造工程におい
て、シリコン等の材料を切断する切断刃(ブレード)の
ドレッシング装置に係るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a dressing device for a cutting blade that cuts materials such as silicon in the manufacturing process of electronic components such as semiconductor devices.

このような切断はのブレードとしては、金属の薄板で作
られる円板の外周部、または環状板の内円周部にダイヤ
モンドの砥粒を電着したものが用いられる。ドレッシン
グは、連続加工によって生ずるブレードの砥粒の目詰ま
り、損耗等を修正し、鋭い切れ刀を再生させる操作であ
る。
The blade used for such cutting is the outer circumference of a disc made of a thin metal plate, or the inner circumference of an annular plate with diamond abrasive grains electrodeposited thereon. Dressing is an operation that corrects clogging and wear and tear of the abrasive grains of the blade caused by continuous processing, and regenerates a sharp cutting knife.

このドレッシングは、極めて重要な作業であって、適時
に行なわれないと、切断の作業性が損なわれ、必要以上
の頻度で行なうと無用に砥粒が除去されて、高価なブレ
ードの寿命を縮めることになる。また、通常、ブレード
の両側面の目詰まりや損耗は均一でなく、切削抵抗が異
なるため、切断加工中にブレードは切削抵抗の小さい方
へ曲がって切込む傾向を生じ、切断面の精度が悪化する
This dressing is a very important operation; if not done in a timely manner, it will impair cutting efficiency, and if done more often than necessary, it will unnecessarily remove abrasive grains and shorten the life of the expensive blade. It turns out. In addition, normally, clogging and wear on both sides of the blade are not uniform, and the cutting resistance is different, so during the cutting process, the blade tends to bend toward the side with lower cutting resistance, which deteriorates the accuracy of the cut surface. do.

このような場合には、ブレードの両側面のうち、目詰ま
りのひどい一側面のみをドレッシングするか、その−側
面をより強(ドレッシングできることが望ましく、これ
を適切に行なえば、ブレードの耐用期間のに長を計るこ
とも可能である。
In such cases, it is desirable to dress only one of the sides of the blade that is more clogged, or to dress that second side more strongly. It is also possible to measure the length.

従来は、被加工物の切断と同じ要領で、プレード側面キ
対ル直立した棒状砥石をブレードで切断する方式により
てドレッシングが行なわれて、きたが、これはンブレー
ド先端の端面の目詰まり解消を主眼とす今もので、ブレ
ード刃先両側面の目詰まり解消、成形は期待できない難
、αがあった。
Traditionally, dressing has been carried out by cutting a bar-shaped grindstone with a blade that is placed upright against the side surface of the blade in the same manner as cutting the workpiece. The main focus was on modern products, and there were some difficulties in eliminating clogging on both sides of the blade edge and not being able to form them.

これに対して、ブレードの両側面の切削性の良否に対応
して、上記ドレッシング砥石をブレードの切断送り方向
に対して任意の角度に傾斜させて切込み、ドレッシング
を行なう方法が提案されているが、傾斜角度、切込量、
または切込送り角度によっては、砥石がブレードの合金
に干渉し、損傷、変形を生ずるため、傾斜角およ゛び切
込量等を慎重に制御しなければならない等の欠、αがあ
った。
On the other hand, a method has been proposed in which the dressing grindstone is tilted at an arbitrary angle with respect to the cutting feed direction of the blade to perform dressing depending on the machinability of both sides of the blade. , inclination angle, depth of cut,
Also, depending on the cutting feed angle, the grinding wheel may interfere with the alloy of the blade, causing damage or deformation, so the inclination angle and depth of cut must be carefully controlled. .

また、円筒状砥石の外周面をブレードの砥粒電着側面に
押圧し、噛合従動回転をさせる方式も考案されでいるが
、この方式では、ブレードの刀先端面のドレッシングが
できないこと、ドレッシング時は切断時より低速でブレ
ードを回転させなければならないこと、ドレッシング砥
石のブレードに対する押圧力のコントロールが難しいこ
と、等の欠点があり、いずれにしても、効果的で、自動
的なドレッシングが困難という問題があった。
In addition, a method has been devised in which the outer circumferential surface of a cylindrical grindstone is pressed against the abrasive electrodeposited side surface of the blade and rotated due to meshing, but with this method, the tip surface of the blade cannot be dressed. However, there are disadvantages such as the need to rotate the blade at a lower speed than when cutting, and the difficulty in controlling the pressure force applied to the dressing wheel on the blade.In any case, effective and automatic dressing is difficult. There was a problem.

本発明は、上記事情を勘考し、それらの問題点を解決す
るための装置を提供するものである。
The present invention takes the above circumstances into consideration and provides a device for solving these problems.

−第2図(イ)、(ロ)、()1)は、本発明の機構、
の概要を示すもので、ブレード1の内周先端部2の孔の
中に砥石3を上下動(I−)方向より挿入し、X方向に
移#5(■)させて、ブレードで切込んでドレッシング
するのであるが、本発明においては、砥石3を、その切
込(II>方向のX−Xaを含んだ直立する面内におい
て、正逆角度に傾斜させる〔以下これをX傾斜(III
)という〕A方式と、砥石3を軸心の周りに回転させi
BB方式および砥石3を前記切込(II)の方向x−x
stと直角なY−Y#!を含む直立面内において、正逆
角度に傾斜させる〔以下これをX傾斜(■)という〕C
方式を、ブレード1の砥粒面の劣化状況に対応して、選
択的に、単独で、または組合わせて、実施可能に構成す
る。
- Figure 2 (a), (b), ()1) shows the mechanism of the present invention,
This shows the outline of the process. Insert the grindstone 3 into the hole in the inner peripheral tip 2 of the blade 1 from the vertical movement (I-) direction, move it in the X direction #5 (■), and make a cut with the blade. However, in the present invention, the grinding wheel 3 is tilted at forward and reverse angles in an upright plane including X-Xa in the direction of cut (II>) [hereinafter referred to as X tilt (III
)] A method, rotating the whetstone 3 around the axis
BB method and grindstone 3 in the direction of the cut (II) x-x
Y-Y# perpendicular to st! (hereinafter referred to as X inclination (■)) C
The methods can be implemented selectively, singly, or in combination depending on the deterioration state of the abrasive grain surface of the blade 1.

ここで、A、B、C方式のドレッシング状態を図によっ
て説明する。
Here, the dressing states of the A, B, and C methods will be explained using diagrams.

第3図の(イ)は、従来の一般的な方式で、切り落とし
、または砥石の中途まで切込を行ない、刀先の目詰まり
解消が主眼である。(ロ)、(ノリは砥石の中途まで切
込み、ブレードの曲がり修正と刃先の下面か上面の目詰
まり修正を主とし、傾針方向を変えた例を示す。
Figure 3 (A) is a conventional, general method in which the cut is cut off or the cut is made halfway through the grindstone, and the main purpose is to eliminate clogging at the tip of the knife. (b), (This is an example in which the glue is cut halfway through the grindstone, and the main purpose is to correct the bending of the blade and correct clogging on the lower or upper surface of the cutting edge, and change the direction of inclination.

第4図はX傾斜のA方式に砥石3の回転、B方式を加え
た例であり、(ニ)はX傾斜は行なわず、切込みは切り
落とし、または中途までで、主に刃先全体の目詰まり解
消と成形によるブレードの座屈、曲がり修正に適する。
Figure 4 is an example of adding the rotation of the grindstone 3 and method B to the X-tilt method A, and in (d), the X-tilt is not performed, the depth of cut is cut off or halfway, and the main problem is clogging of the entire cutting edge. Suitable for correcting buckling and bending of blades by eliminating and forming.

(ホ)、(へ)の図の場合は、主としてブレードの下面
か上面と先端角部の部分成形に適した方式で、ブレード
の上面、または下面側への曲がり修正に効果がある°。
In the case of (E) and (F), this method is mainly suitable for partially forming the lower or upper surface of the blade and the tip corner, and is effective for correcting bends toward the upper or lower surface of the blade.

第5図の場合は、第4図の例に、さらにX傾斜のC方式
を組合わせた状態を示し、図(ト)は、砥石3の回転、
すなわちB方式とX傾斜のC方式の組合わせで、ブレー
ドの先端角部を均等に成形する場合に適する=(チ)、
(す)はさらに、正逆のC傾斜を加えた場合の状態で、
両側面と先端の成形が同時に可能である。rIS5図の
A、B、C組合わせ方式によればブレードの側面及び画
先端角部が一度にドレッシング、成形されるので、ドレ
ッシング作業時開の短縮、並びに画先端角部に対するド
レッシング効果のy4節がはかれる等、極めて効率的な
手段である。
In the case of FIG. 5, the example in FIG. 4 is further combined with the C method of X inclination, and FIG.
In other words, the combination of B method and C method with X inclination is suitable for uniformly shaping the tip corner of the blade = (H),
(S) is the state when a forward and reverse C slope is added,
It is possible to mold both sides and the tip at the same time. According to the combination method of A, B, and C in Figure rIS5, the side surface of the blade and the corner of the front edge of the image are dressed and shaped at the same time, so the opening time during dressing work is shortened, and the dressing effect on the corner of the front edge of the image is reduced in section y4. It is an extremely efficient method.

次に、以上述べたA、B、C方式の実施可能な本発明の
装置の実施例を図面を参照にして説明する。第1図にお
いて、固定部4の上に案内5によって移動可能の移動台
6を設ける。また、固定部4の上には棒状の砥石3をブ
レード1に押圧し、切込む機構用のモータ7を固定し、
このモータにねじM8のナツト9を取り付ける。移動台
6には、ねじ袖8に対して直角方向の回転軸11の軸受
け10を設け、この紬11には、直角に揺動@14が取
り付けられる。移動台6の上には揺動可能にシリング1
2をほぼ水平に設け、そのピストンロッド13の先端を
揺動板14に軸支して、ン、リング、ピストンにより“
、袖11を希望する角度だけ旋回可能とする二軸11の
図の左一端には、内部にモータを設け、これによって棒
状砥石3のチャック16を回転させるボックス15を取
り付ける。なお、ボックス15には、ドレッシングする
度に砥石先端が切り落とされるので、チャック16の前
進(図では下降)を行なわせる移四j機構を内桟する。
Next, embodiments of the apparatus of the present invention that can implement the A, B, and C methods described above will be described with reference to the drawings. In FIG. 1, a movable table 6 is provided on the fixed part 4 and is movable by a guide 5. As shown in FIG. Further, a motor 7 for a mechanism for pressing a bar-shaped grindstone 3 against the blade 1 and cutting it is fixed on the fixed part 4,
Attach nut 9 with M8 screw to this motor. The moving table 6 is provided with a bearing 10 for a rotating shaft 11 that is perpendicular to the screw sleeve 8, and a swing @14 is attached to the pongee 11 at a right angle. On the movable table 6, there is a shilling 1 that can be swung.
2 is installed almost horizontally, and the tip of the piston rod 13 is pivotally supported on the rocking plate 14, and the "
A box 15 is attached to the left end of the two shafts 11 that allow the sleeve 11 to rotate by a desired angle, and a motor is provided inside to rotate the chuck 16 of the bar-shaped grindstone 3. The box 15 is provided with a moving mechanism for moving the chuck 16 forward (downward in the figure) since the tip of the grindstone is cut off each time it is dressed.

また、不使用時には、紬11を旋回して砥石3の中心輪
をほぼ90度旋回せしめてねじ軸8の回転により移動台
6を移動させて、ウェハーの切断作業に支障をきたさな
い位置に移す。そしてドレッシングを行なうときには、
砥石をブレードの内周または外周位置に移して、シリン
ダ12゛を作動させて、砥石をブレード1に対して所菫
の角度に傾斜させ、モータ7を回転して、砥石を矢印1
7の方向に移動させる。このとき同時にボ・ンクス15
内のモータを回転させて、砥石を回転状態においてドレ
ッシングを行なう。
When not in use, the pongee 11 is rotated to rotate the center wheel of the grindstone 3 by approximately 90 degrees, and the movable table 6 is moved by rotation of the screw shaft 8 to a position that does not interfere with the wafer cutting operation. . And when dressing,
Move the whetstone to the inner or outer circumference of the blade, operate the cylinder 12' to tilt the whetstone at the desired angle with respect to the blade 1, rotate the motor 7, and move the whetstone in the direction of arrow 1.
Move it in the direction of 7. At this time, Bonx 15
Dressing is performed by rotating the motor inside the grinder and rotating the grindstone.

さらに、ピストンロッド20をシリング21から、出入
させることにより、砥石棒の先端を支点22を中心に、
第1図においては左右に傾斜させることができる。
Furthermore, by moving the piston rod 20 in and out of the shilling 21, the tip of the grindstone rod can be moved around the fulcrum 22.
In FIG. 1, it can be tilted left and right.

なお、上記天施例においては内周刃式縦型切断機への適
用例について説明したが、本発明の装置は、外周刃の場
合も、横型の場合もほぼ同様に、これを採用できるのは
言うまでもない。
In addition, in the above embodiment, an example of application to a vertical cutter with an inner peripheral blade was explained, but the device of the present invention can be similarly applied to both a peripheral blade type and a horizontal type cutting machine. Needless to say.

以上詳述したように、本発明の装置によれば、ブレード
の変形状態、切断形状、切断面粗さ等の諸条件に対して
最適な方式を選択して、自動的にドレッシング操作を行
なうことができるので、被加工物の精度の向上と、稼動
率の向上をはかることが可能となる。さらに、ブレード
の砥粒の消耗゛を最小限に抑え、ブレードの耐用期間を
着しく延ばすことができる等の効果が得られる。
As detailed above, according to the device of the present invention, the dressing operation can be automatically performed by selecting the optimal method based on various conditions such as the deformation state of the blade, the cutting shape, and the roughness of the cut surface. As a result, it is possible to improve the precision of the workpiece and the operating rate. Further, the wear of the abrasive grains of the blade can be minimized, and the useful life of the blade can be significantly extended.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す説明図、第2図は砥石
の傾斜方向等の説明図で、(イ)図はプレ゛−ドと砥石
の関係図、(ロ)図は(イ)図のイ方向矢視図、(ハ)
図は(イ)図のへ方向矢視図、第3図、第4図、第5図
はブレードと砥石との関係を示す説明図。 1:内周刃ブレード、 2:端部、 3:砥石、5:案
内、 7:モータ、 8:ねじ軸、 9:す・zト、1
1:軸、 12ニジリング、 14:揺動板、15:回
転機構を有するボックス、
Fig. 1 is an explanatory diagram showing one embodiment of the present invention, Fig. 2 is an explanatory diagram of the inclination direction of the grindstone, etc., (a) is a diagram of the relationship between the blade and the grindstone, and (b) is ( A) A view in the direction of arrow A in the figure, (c)
The figure is (a) a view taken in the direction of the arrow in the figure, and FIGS. 3, 4, and 5 are explanatory diagrams showing the relationship between the blade and the grindstone. 1: Inner peripheral blade, 2: End, 3: Grindstone, 5: Guide, 7: Motor, 8: Screw shaft, 9: S/Z, 1
1: Axis, 12 Nijiring, 14: Swing plate, 15: Box with rotation mechanism,

Claims (2)

【特許請求の範囲】[Claims] (1)切断機のブレードのドレッシング装置において、
ドレッシング用棒状砥石をブレードに対して、任意の角
度に傾斜させる傾斜機構と、棒状砥石の回転機構、およ
び砥石をブレードに対して切込む移動機構を有すること
を特徴とするブレードのドレッシング装置。
(1) In a cutting machine blade dressing device,
A blade dressing device comprising: a tilting mechanism for tilting a dressing bar-shaped grindstone at an arbitrary angle with respect to the blade; a rotating mechanism for the bar-shaped grindstone; and a moving mechanism for cutting the grindstone into the blade.
(2)特許請求の範囲第1項の記載において棒状砥石の
傾斜機構は、ブレード側面と直角で、切込み移動方向面
に沿った傾斜、並びにこれに直交する方向の面に沿った
傾斜を選択的に、かつ、その双方を同時に可能としたブ
レードのドレッシング装置。
(2) In the description of claim 1, the inclination mechanism of the bar-shaped grindstone selectively inclines along the cutting movement direction plane and the inclination along the plane perpendicular to this, at right angles to the side surface of the blade. A blade dressing device that can do both at the same time.
JP59201149A 1984-09-26 1984-09-26 Dressing device for blade Granted JPS6179568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59201149A JPS6179568A (en) 1984-09-26 1984-09-26 Dressing device for blade

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59201149A JPS6179568A (en) 1984-09-26 1984-09-26 Dressing device for blade

Publications (2)

Publication Number Publication Date
JPS6179568A true JPS6179568A (en) 1986-04-23
JPH04787B2 JPH04787B2 (en) 1992-01-08

Family

ID=16436200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59201149A Granted JPS6179568A (en) 1984-09-26 1984-09-26 Dressing device for blade

Country Status (1)

Country Link
JP (1) JPS6179568A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01210267A (en) * 1988-02-15 1989-08-23 Tokyo Seimitsu Co Ltd Dresser for inner circumferential edge

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52103786A (en) * 1976-02-27 1977-08-31 Hitachi Ltd Method of cutting crystal body
JPS57144663A (en) * 1981-03-02 1982-09-07 Tokyo Seimitsu Co Ltd Dresser for slicer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52103786A (en) * 1976-02-27 1977-08-31 Hitachi Ltd Method of cutting crystal body
JPS57144663A (en) * 1981-03-02 1982-09-07 Tokyo Seimitsu Co Ltd Dresser for slicer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01210267A (en) * 1988-02-15 1989-08-23 Tokyo Seimitsu Co Ltd Dresser for inner circumferential edge

Also Published As

Publication number Publication date
JPH04787B2 (en) 1992-01-08

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