JPS6179490U - - Google Patents

Info

Publication number

JPS6179490U

JPS6179490U JP16405284U JP16405284U JPS6179490U JP S6179490 U JPS6179490 U JP S6179490U JP 16405284 U JP16405284 U JP 16405284U JP 16405284 U JP16405284 U JP 16405284U JP S6179490 U JPS6179490 U JP S6179490U

Authority

JP

Japan

Prior art keywords

heater element

quartz tube

heater

end cap

insulating film

Prior art date

1984-10-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 6
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
• 229910052573 porcelain Inorganic materials 0.000 claims description 2
• 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1