JPS6178871U - - Google Patents

Info

Publication number

JPS6178871U

JPS6178871U JP15981184U JP15981184U JPS6178871U JP S6178871 U JPS6178871 U JP S6178871U JP 15981184 U JP15981184 U JP 15981184U JP 15981184 U JP15981184 U JP 15981184U JP S6178871 U JPS6178871 U JP S6178871U

Authority

JP

Japan

Prior art keywords

molecular beam

molecular

bellows

beam source

utility

Prior art date

1984-10-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001451 molecular beam epitaxy Methods 0.000 claims 1
• 238000007796 conventional method Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (1)