JPS6175873U - - Google Patents

Info

Publication number
JPS6175873U
JPS6175873U JP16023284U JP16023284U JPS6175873U JP S6175873 U JPS6175873 U JP S6175873U JP 16023284 U JP16023284 U JP 16023284U JP 16023284 U JP16023284 U JP 16023284U JP S6175873 U JPS6175873 U JP S6175873U
Authority
JP
Japan
Prior art keywords
reaction
chamber
inlet
vapor
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16023284U
Other languages
English (en)
Japanese (ja)
Other versions
JPS646943Y2 (US06623731-20030923-C00052.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16023284U priority Critical patent/JPS646943Y2/ja
Publication of JPS6175873U publication Critical patent/JPS6175873U/ja
Application granted granted Critical
Publication of JPS646943Y2 publication Critical patent/JPS646943Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP16023284U 1984-10-23 1984-10-23 Expired JPS646943Y2 (US06623731-20030923-C00052.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16023284U JPS646943Y2 (US06623731-20030923-C00052.png) 1984-10-23 1984-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16023284U JPS646943Y2 (US06623731-20030923-C00052.png) 1984-10-23 1984-10-23

Publications (2)

Publication Number Publication Date
JPS6175873U true JPS6175873U (US06623731-20030923-C00052.png) 1986-05-22
JPS646943Y2 JPS646943Y2 (US06623731-20030923-C00052.png) 1989-02-23

Family

ID=30718157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16023284U Expired JPS646943Y2 (US06623731-20030923-C00052.png) 1984-10-23 1984-10-23

Country Status (1)

Country Link
JP (1) JPS646943Y2 (US06623731-20030923-C00052.png)

Also Published As

Publication number Publication date
JPS646943Y2 (US06623731-20030923-C00052.png) 1989-02-23

Similar Documents

Publication Publication Date Title
JPH02140167U (US06623731-20030923-C00052.png)
JPS6175873U (US06623731-20030923-C00052.png)
JPS60148048U (ja) 気液分離タンク
JPS6360799U (US06623731-20030923-C00052.png)
JPS641710U (US06623731-20030923-C00052.png)
JPH0120524Y2 (US06623731-20030923-C00052.png)
JPS61138216U (US06623731-20030923-C00052.png)
JPS5833716U (ja) 消音器
JPS60173854U (ja) 風呂熱交換器
JPH02122973U (US06623731-20030923-C00052.png)
JPS6213365U (US06623731-20030923-C00052.png)
JPS5835999U (ja) 浄水装置
JPH0188017U (US06623731-20030923-C00052.png)
JPS5869200U (ja) 低沸点流体の噴射装置
JPS61110979U (US06623731-20030923-C00052.png)
JPS6276864U (US06623731-20030923-C00052.png)
JPS6250702U (US06623731-20030923-C00052.png)
JPS60173618U (ja) マフラ構造
JPH01152014U (US06623731-20030923-C00052.png)
JPS62131167U (US06623731-20030923-C00052.png)
JPS5880665U (ja) ガスケツト
JPS5825962U (ja) パツクドバルブ
JPS6155994U (US06623731-20030923-C00052.png)
JPS63173603U (US06623731-20030923-C00052.png)
JPS6446665U (US06623731-20030923-C00052.png)