JPS6175543A - 集積回路の形成方法 - Google Patents

集積回路の形成方法

Info

Publication number
JPS6175543A
JPS6175543A JP19800184A JP19800184A JPS6175543A JP S6175543 A JPS6175543 A JP S6175543A JP 19800184 A JP19800184 A JP 19800184A JP 19800184 A JP19800184 A JP 19800184A JP S6175543 A JPS6175543 A JP S6175543A
Authority
JP
Japan
Prior art keywords
layer wiring
internal
wiring
semiconductor integrated
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19800184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572748B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Toshiji Ayabe
綾部　利治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19800184A priority Critical patent/JPS6175543A/ja
Publication of JPS6175543A publication Critical patent/JPS6175543A/ja
Publication of JPH0572748B2 publication Critical patent/JPH0572748B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP19800184A 1984-09-21 1984-09-21 集積回路の形成方法 Granted JPS6175543A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19800184A JPS6175543A (ja) 1984-09-21 1984-09-21 集積回路の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19800184A JPS6175543A (ja) 1984-09-21 1984-09-21 集積回路の形成方法

Publications (2)

Publication Number Publication Date
JPS6175543A true JPS6175543A (ja) 1986-04-17
JPH0572748B2 JPH0572748B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-12

Family

ID=16383860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19800184A Granted JPS6175543A (ja) 1984-09-21 1984-09-21 集積回路の形成方法

Country Status (1)

Country Link
JP (1) JPS6175543A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0474438U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-11-09 1992-06-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0474438U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-11-09 1992-06-30

Also Published As

Publication number Publication date
JPH0572748B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term