JPS6175129U - - Google Patents

Info

Publication number

JPS6175129U

JPS6175129U JP15977384U JP15977384U JPS6175129U JP S6175129 U JPS6175129 U JP S6175129U JP 15977384 U JP15977384 U JP 15977384U JP 15977384 U JP15977384 U JP 15977384U JP S6175129 U JPS6175129 U JP S6175129U

Authority

JP

Japan

Prior art keywords

plasma etching

etching apparatus

longitudinal direction

jig

loading jig

Prior art date

1984-10-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001020 plasma etching Methods 0.000 claims description 3
• 238000010438 heat treatment Methods 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)