JPS6175125U - - Google Patents

Info

Publication number
JPS6175125U
JPS6175125U JP15980484U JP15980484U JPS6175125U JP S6175125 U JPS6175125 U JP S6175125U JP 15980484 U JP15980484 U JP 15980484U JP 15980484 U JP15980484 U JP 15980484U JP S6175125 U JPS6175125 U JP S6175125U
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
view
sectional
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15980484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15980484U priority Critical patent/JPS6175125U/ja
Publication of JPS6175125U publication Critical patent/JPS6175125U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15980484U 1984-10-24 1984-10-24 Pending JPS6175125U (US07923587-20110412-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15980484U JPS6175125U (US07923587-20110412-C00001.png) 1984-10-24 1984-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15980484U JPS6175125U (US07923587-20110412-C00001.png) 1984-10-24 1984-10-24

Publications (1)

Publication Number Publication Date
JPS6175125U true JPS6175125U (US07923587-20110412-C00001.png) 1986-05-21

Family

ID=30717750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15980484U Pending JPS6175125U (US07923587-20110412-C00001.png) 1984-10-24 1984-10-24

Country Status (1)

Country Link
JP (1) JPS6175125U (US07923587-20110412-C00001.png)

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