JPS6173578U - - Google Patents

Info

Publication number
JPS6173578U
JPS6173578U JP15628884U JP15628884U JPS6173578U JP S6173578 U JPS6173578 U JP S6173578U JP 15628884 U JP15628884 U JP 15628884U JP 15628884 U JP15628884 U JP 15628884U JP S6173578 U JPS6173578 U JP S6173578U
Authority
JP
Japan
Prior art keywords
wafer carrier
handle
wafers
storing
longitudinal direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15628884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15628884U priority Critical patent/JPS6173578U/ja
Publication of JPS6173578U publication Critical patent/JPS6173578U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
JP15628884U 1984-10-15 1984-10-15 Pending JPS6173578U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15628884U JPS6173578U (US20030204162A1-20031030-M00001.png) 1984-10-15 1984-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15628884U JPS6173578U (US20030204162A1-20031030-M00001.png) 1984-10-15 1984-10-15

Publications (1)

Publication Number Publication Date
JPS6173578U true JPS6173578U (US20030204162A1-20031030-M00001.png) 1986-05-19

Family

ID=30714293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15628884U Pending JPS6173578U (US20030204162A1-20031030-M00001.png) 1984-10-15 1984-10-15

Country Status (1)

Country Link
JP (1) JPS6173578U (US20030204162A1-20031030-M00001.png)

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