JPS6172677U - - Google Patents

Info

Publication number

JPS6172677U

JPS6172677U JP15722584U JP15722584U JPS6172677U JP S6172677 U JPS6172677 U JP S6172677U JP 15722584 U JP15722584 U JP 15722584U JP 15722584 U JP15722584 U JP 15722584U JP S6172677 U JPS6172677 U JP S6172677U

Authority

JP

Japan

Prior art keywords

cantilever beam

diffused resistor

semiconductor

deviation

tip

Prior art date

1984-10-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 2
• 230000001133 acceleration Effects 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000009713 electroplating Methods 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000009792 diffusion process Methods 0.000 description 1
• 230000005484 gravity Effects 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1

Cited By (1)