JPS6171354U - - Google Patents

Info

Publication number
JPS6171354U
JPS6171354U JP1984155791U JP15579184U JPS6171354U JP S6171354 U JPS6171354 U JP S6171354U JP 1984155791 U JP1984155791 U JP 1984155791U JP 15579184 U JP15579184 U JP 15579184U JP S6171354 U JPS6171354 U JP S6171354U
Authority
JP
Japan
Prior art keywords
workpiece
ring body
workpiece holder
ring
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984155791U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984155791U priority Critical patent/JPS6171354U/ja
Publication of JPS6171354U publication Critical patent/JPS6171354U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1984155791U 1984-10-17 1984-10-17 Pending JPS6171354U (US07652168-20100126-C00068.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984155791U JPS6171354U (US07652168-20100126-C00068.png) 1984-10-17 1984-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984155791U JPS6171354U (US07652168-20100126-C00068.png) 1984-10-17 1984-10-17

Publications (1)

Publication Number Publication Date
JPS6171354U true JPS6171354U (US07652168-20100126-C00068.png) 1986-05-15

Family

ID=30713803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984155791U Pending JPS6171354U (US07652168-20100126-C00068.png) 1984-10-17 1984-10-17

Country Status (1)

Country Link
JP (1) JPS6171354U (US07652168-20100126-C00068.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009023053A (ja) * 2007-07-20 2009-02-05 Nikon Corp 研磨装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532787A (en) * 1976-06-30 1978-01-11 Koga Tadashi Grinding jig

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532787A (en) * 1976-06-30 1978-01-11 Koga Tadashi Grinding jig

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009023053A (ja) * 2007-07-20 2009-02-05 Nikon Corp 研磨装置

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