JPS6171241U - - Google Patents

Info

Publication number

JPS6171241U

JPS6171241U JP15541284U JP15541284U JPS6171241U JP S6171241 U JPS6171241 U JP S6171241U JP 15541284 U JP15541284 U JP 15541284U JP 15541284 U JP15541284 U JP 15541284U JP S6171241 U JPS6171241 U JP S6171241U

Authority

JP

Japan

Prior art keywords

adjustment valve

cleaning bottle

pressure control

internal pressure

gas phase

Prior art date

1984-10-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 4
• 239000007788 liquid Substances 0.000 claims description 2
• 230000001105 regulatory effect Effects 0.000 description 1
• 238000005406 washing Methods 0.000 description 1

Cited By (1)