JPS6170941U - - Google Patents

Info

Publication number

JPS6170941U

JPS6170941U JP15581484U JP15581484U JPS6170941U JP S6170941 U JPS6170941 U JP S6170941U JP 15581484 U JP15581484 U JP 15581484U JP 15581484 U JP15581484 U JP 15581484U JP S6170941 U JPS6170941 U JP S6170941U

Authority

JP

Japan

Prior art keywords

coating formed

hard silicon

silicon coating

semiconductor device

utility

Prior art date

1984-10-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000011248 coating agent Substances 0.000 claims description 4
• 238000000576 coating method Methods 0.000 claims description 4
• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
• 239000002184 metal Substances 0.000 description 2