JPS6170936U - - Google Patents

Info

Publication number
JPS6170936U
JPS6170936U JP15564284U JP15564284U JPS6170936U JP S6170936 U JPS6170936 U JP S6170936U JP 15564284 U JP15564284 U JP 15564284U JP 15564284 U JP15564284 U JP 15564284U JP S6170936 U JPS6170936 U JP S6170936U
Authority
JP
Japan
Prior art keywords
susceptor
protective tube
reactor
axial direction
temperature measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15564284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15564284U priority Critical patent/JPS6170936U/ja
Publication of JPS6170936U publication Critical patent/JPS6170936U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15564284U 1984-10-15 1984-10-15 Pending JPS6170936U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15564284U JPS6170936U (US20100223739A1-20100909-C00005.png) 1984-10-15 1984-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15564284U JPS6170936U (US20100223739A1-20100909-C00005.png) 1984-10-15 1984-10-15

Publications (1)

Publication Number Publication Date
JPS6170936U true JPS6170936U (US20100223739A1-20100909-C00005.png) 1986-05-15

Family

ID=30713660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15564284U Pending JPS6170936U (US20100223739A1-20100909-C00005.png) 1984-10-15 1984-10-15

Country Status (1)

Country Link
JP (1) JPS6170936U (US20100223739A1-20100909-C00005.png)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
J ELECTROCHEM.SOC=1975 *

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