JPS617084A - 回転チヨツパ−ミラ−組立体 - Google Patents

回転チヨツパ−ミラ−組立体

Info

Publication number
JPS617084A
JPS617084A JP59127931A JP12793184A JPS617084A JP S617084 A JPS617084 A JP S617084A JP 59127931 A JP59127931 A JP 59127931A JP 12793184 A JP12793184 A JP 12793184A JP S617084 A JPS617084 A JP S617084A
Authority
JP
Japan
Prior art keywords
chopper mirror
mirror
rotating
mirror assembly
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59127931A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0216197B2 (enrdf_load_stackoverflow
Inventor
Katsumasa Yamaguchi
勝正 山口
Koichi Kawada
耕一 河田
Yukio Sakagaito
坂垣内 征雄
Takeshi Masaki
健 正木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59127931A priority Critical patent/JPS617084A/ja
Publication of JPS617084A publication Critical patent/JPS617084A/ja
Publication of JPH0216197B2 publication Critical patent/JPH0216197B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP59127931A 1984-06-21 1984-06-21 回転チヨツパ−ミラ−組立体 Granted JPS617084A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59127931A JPS617084A (ja) 1984-06-21 1984-06-21 回転チヨツパ−ミラ−組立体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59127931A JPS617084A (ja) 1984-06-21 1984-06-21 回転チヨツパ−ミラ−組立体

Publications (2)

Publication Number Publication Date
JPS617084A true JPS617084A (ja) 1986-01-13
JPH0216197B2 JPH0216197B2 (enrdf_load_stackoverflow) 1990-04-16

Family

ID=14972175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59127931A Granted JPS617084A (ja) 1984-06-21 1984-06-21 回転チヨツパ−ミラ−組立体

Country Status (1)

Country Link
JP (1) JPS617084A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0216197B2 (enrdf_load_stackoverflow) 1990-04-16

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