JPS617023B2 - - Google Patents

Info

Publication number
JPS617023B2
JPS617023B2 JP4336079A JP4336079A JPS617023B2 JP S617023 B2 JPS617023 B2 JP S617023B2 JP 4336079 A JP4336079 A JP 4336079A JP 4336079 A JP4336079 A JP 4336079A JP S617023 B2 JPS617023 B2 JP S617023B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4336079A
Other languages
Japanese (ja)
Other versions
JPS55134948A (en
Inventor
Masaharu Aoyama
Shunichi Kai
Chiharu Kato
Toshio Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP4336079A priority Critical patent/JPS55134948A/en
Publication of JPS55134948A publication Critical patent/JPS55134948A/en
Publication of JPS617023B2 publication Critical patent/JPS617023B2/ja
Granted legal-status Critical Current

Links

JP4336079A 1979-04-10 1979-04-10 Manufacturing of semiconductor device Granted JPS55134948A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4336079A JPS55134948A (en) 1979-04-10 1979-04-10 Manufacturing of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4336079A JPS55134948A (en) 1979-04-10 1979-04-10 Manufacturing of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55134948A JPS55134948A (en) 1980-10-21
JPS617023B2 true JPS617023B2 (en) 1986-03-03

Family

ID=12661679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4336079A Granted JPS55134948A (en) 1979-04-10 1979-04-10 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55134948A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4372034B1 (en) * 1981-03-26 1998-07-21 Intel Corp Process for forming contact openings through oxide layers

Also Published As

Publication number Publication date
JPS55134948A (en) 1980-10-21

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