JPS6169824U - - Google Patents

Info

Publication number

JPS6169824U

JPS6169824U JP15344984U JP15344984U JPS6169824U JP S6169824 U JPS6169824 U JP S6169824U JP 15344984 U JP15344984 U JP 15344984U JP 15344984 U JP15344984 U JP 15344984U JP S6169824 U JPS6169824 U JP S6169824U

Authority

JP

Japan

Prior art keywords

vapor deposition

semiconductor wafer

deposition source

irradiated

registration request

Prior art date

1984-10-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• 238000007740 vapor deposition Methods 0.000 claims 4
• 238000010586 diagram Methods 0.000 description 1
• 230000008020 evaporation Effects 0.000 description 1
• 238000001704 evaporation Methods 0.000 description 1

Cited By (1)