JPS6167890U - - Google Patents

Info

Publication number

JPS6167890U

JPS6167890U JP15145584U JP15145584U JPS6167890U JP S6167890 U JPS6167890 U JP S6167890U JP 15145584 U JP15145584 U JP 15145584U JP 15145584 U JP15145584 U JP 15145584U JP S6167890 U JPS6167890 U JP S6167890U

Authority

JP

Japan

Prior art keywords

chamber

air

end surface

shower

communication

Prior art date

1984-10-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004887 air purification Methods 0.000 claims description 6
• 238000005192 partition Methods 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 2

Cited By (2)