JPS6166957U - - Google Patents

Info

Publication number

JPS6166957U

JPS6166957U JP15273684U JP15273684U JPS6166957U JP S6166957 U JPS6166957 U JP S6166957U JP 15273684 U JP15273684 U JP 15273684U JP 15273684 U JP15273684 U JP 15273684U JP S6166957 U JPS6166957 U JP S6166957U

Authority

JP

Japan

Prior art keywords

silicon chip

bonding

bonding structure

anodic bonding

glass

Prior art date

1984-10-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
• 239000011521 glass Substances 0.000 claims description 6
• 229910052710 silicon Inorganic materials 0.000 claims description 6
• 239000010703 silicon Substances 0.000 claims description 6
• 239000010409 thin film Substances 0.000 claims description 2
• 238000004544 sputter deposition Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 239000000758 substrate Substances 0.000 description 3
• RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
• 239000005297 pyrex Substances 0.000 description 2
• 239000010408 film Substances 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 238000002844 melting Methods 0.000 description 1